Custom-Geometry Contact Probe for Dense Semiconductor Testing

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Solution Overview

Problem

Existing contact probes and testing heads for probe cards are not optimally adaptable to different semiconductor configurations, leading to varying test performances and suboptimal contact pressure and geometric control under load.

Innovation Solution

A contact probe with customized geometry, featuring a central body with varying cross-sectional areas and configurations, optimized dimensions, and an abutment element for precise insertion and pressure control, allowing simplified assembly and efficient testing across diverse semiconductor boards.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a substantially vertical probe configuration is used to incorporate a high number of probes per unit area, then the density of probes increases, but the adaptability to different semiconductor configurations decreases

Engineering Contradiction:
Improvenumber of probes per unit areaVSAvoidadaptability to different semiconductor configurations
Core Design Contradiction:
Quantity of substanceVSAdaptability or versatility

Solution Approach 1:

The probe structure is segmented into distinct functional zones: a first end with a first contact tip for semiconductor contact, a second end with a second contact tip for probe card contact, and a central body extending between them. This segmentation allows each zone to be optimized independently for its specific function while maintaining overall probe density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different portions of the probe have different cross-sectional areas: the central body has a smaller cross-sectional area than both the first end and the second end. This local variation in geometry allows the probe to maintain high density while adapting to different semiconductor configurations through controlled deformation characteristics in specific regions.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If the probe cross-sectional area is reduced to achieve reduced pitches, then the contact pressure increases, but the structural robustness decreases

Engineering Contradiction:
Improvereduced pitch capabilityVSAvoidstructural robustness
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The probe exhibits local quality through varying cross-sectional areas along its length. The central body has a smaller cross-sectional area than the first end and second end, creating regions of different mechanical properties. This allows the probe to achieve reduced pitch capability where needed while maintaining structural robustness at the contact tips through larger cross-sectional areas.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The probe design transitions from a uniform one-dimensional structure to a three-dimensional structure with varying cross-sectional areas. This dimensional complexity allows simultaneous optimization of pitch (lateral dimension) and structural strength (overall geometry) by controlling the distribution of material along the probe's length.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If the probe geometry is customized for optimal contact pressure, then the test performance improves, but the device complexity increases

Engineering Contradiction:
Improvetest performanceVSAvoidprobe structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The probe is divided into three main segments: a first end with a first contact tip, a second end with a second contact tip, and a central body. This segmentation allows customization of contact pressure characteristics while maintaining a relatively simple overall structure that is easy to manufacture and maintain.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe has different cross-sectional areas at different locations: the central body has a smaller cross-sectional area than the first end and second end. This local variation optimizes contact pressure distribution for improved test performance while keeping the structure simple enough for practical manufacturing and maintenance.

Inventive Principle:
Principle #3Local quality

4Ease of operation

If the probe has axial mobility through guide holes to withstand compression, then the ability to remove and replace probes improves, but the control of geometric configuration under load decreases

Engineering Contradiction:
Improveprobe replaceabilityVSAvoidgeometric configuration control under load
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The probe structure with distinct ends and a central body allows controlled deformation under compression loads. The varying cross-sectional areas create predictable stress distribution patterns that maintain geometric configuration control even while allowing axial mobility through the guide holes for ease of replacement.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The customized probe geometry ensures optimal contact pressure, reduced pitch capabilities, and efficient testing performance while maintaining robustness and ease of maintenance, adapting to various semiconductor configurations.

Implementation Method 1

The holes of the respective plates through which a certain probe passes are generally slightly offset so that each probe is axially mobile through the respective housing holes, but with some friction which, along with the inherent flexibility of the probes themselves, confers a certain overall ability to withstand compression to the testing head assembly, as if it were slightly cushioned.

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentEP4664117A1Contact probe with customizable geometry and relative probe head
Publication Date: 2025.12.17 MICROTEST SPA
  • EP4664117A1 patent drawingFigure 1
  • EP4664117A1 patent drawingFigure 2
  • EP4664117A1 patent drawingFigure 3~3B

AI summary

Contact probe (1) comprising a first end (6) having a first contact tip (7) adapted to contact an electronic component under test, a second end (8) having a second contact tip (9) adapted to contact a probe card, and a central body (17) which extends between said first end (6) and said second end (8), a cross-sectional area at said central body (17) being smaller than a cross-sectional area at said first end (6) and a cross-sectional area at said second end (8), wherein said central body (17) provides at least one portion with a rectilinear configuration (18), which develops along a longitudinal axis (x), and at least one portion with a curvilinear configuration (19), which moves away from said longitudinal axis (x), and wherein an extension, measured along the longitudinal axis (x), of a first longitudinal section (D) comprising said second end (8) and said portion with a rectilinear configuration (18) and an extension, measured along the longitudinal axis (x), of a second longitudinal section (L) comprising said second end (8) and said central body (17) are sized so that a reciprocal ratio (D/L) between the extension of the first longitudinal section (D) and the extension of the second longitudinal section (L) is between 0.4 and 0.65.