Contactless Driving Module for Semiconductor Transfer Apparatus
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Solution Overview
Problem
In semiconductor manufacturing, conventional transfer apparatuses generate particles due to friction between running rails and wheels, compromising cleanliness in clean rooms as the integration of semiconductor devices increases.
Innovation Solution
A contactless driving module utilizing permanent magnets to generate propulsive force without contact, integrated into a transfer apparatus that includes magnetic levitation for reducing friction and particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If conventional running wheels are used on running rails, then the transfer apparatus can be driven mechanically, but particles are generated due to friction between the running rails and running wheels
Solution Approach 1:
The patent replaces the conventional mechanical friction-based driving system with a magnetic field-based contactless driving system. Permanent magnets are arranged on the running rails and the driving wheel, creating magnetic attraction/repulsion forces that propel the driving wheel without physical contact between the wheel and rails, thereby eliminating friction-generated particles.
Solution Approach 2:
The patent introduces magnetic fields as an intermediary between the running rails and the driving wheel. The permanent magnets on the rails and driving wheel create a magnetic field interaction zone that transmits driving force without direct mechanical contact, serving as a mediator that eliminates particle-generating friction while maintaining effective propulsion.
2Object-generated harmful factors
If contactless magnetic driving is used, then particle generation is reduced, but the device complexity increases due to permanent magnet arrangements
Solution Approach 1:
The patent divides the permanent magnets into two separate segments: one set mounted on the running rails and another set mounted on the driving wheel. This segmentation allows each component to be independently designed, assembled, and maintained, reducing overall system complexity despite the contactless magnetic driving requirement.
Solution Approach 2:
The patent uses permanent magnets strategically positioned only at the critical interaction zones where magnetic force transmission is needed, rather than covering entire surfaces. This partial application of magnetic components achieves the contactless driving function while minimizing the total number of magnets and associated complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces particle generation and maintains cleanliness in clean rooms by using magnetic forces to propel the driving wheel along running rails, minimizing contact and friction.
Implementation Method 1
a contactless driving module configured to be movable in a contactless manner using a magnetic force between permanent magnets
Implementation Method 2
a pair of running rails extending parallel with each other and including a plurality of first permanent magnets and a plurality of second permanent magnets arranged in an extending direction, respectively, a driving wheel disposed between the running rails to be spaced apart from the running rails and including a plurality of third permanent magnets arranged in a circumferential direction
Data Source
AI summary
A transfer apparatus includes a guide rails extending parallel with each other, a vehicle configured to be movable along the guide rails, and a contactless driving module mounted to the vehicle. The contactless driving module includes a pair of running rails extending parallel with the guide rails and comprising a plurality of first permanent magnets and a plurality of second permanent magnets arranged in a extending direction, respectively, a driving wheel disposed between the running rails to be spaced apart from the running rails and comprising a plurality of third permanent magnets arranged in a circumferential direction, and a driving unit for rotating the driving wheel. Particularly, at least one of the third permanent magnets is disposed between the first permanent magnets and the second permanent magnets.