Contactless Power Supply for Rotary Table Using Induction
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Solution Overview
Problem
Existing wafer rotating and holding devices face challenges in supplying electric power to rotary tables without physical contact, which limits the complexity and efficiency of wafer processing due to contact noise and restricted rotation numbers.
Innovation Solution
A contactless electric power supply mechanism using a rotary shaft, a rotary table, a drive motor, a fixed-side primary coil, a rotary table-side secondary coil, and resonant capacitors for electromagnetic induction, allowing power transfer to a load connected to the rotary table without physical contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contactless electric power supply is implemented using electromagnetic induction between fixed-side primary coil and rotary table-side secondary coil, then the number of rotations increases and contact noise is prevented, but device complexity increases due to addition of multiple coils and resonant capacitors
Solution Approach 1:
The patent replaces the mechanical contact-based power supply system with an electromagnetic induction system. Instead of using sliding contacts or brushes that physically connect to the rotating table, the invention uses a primary coil fixed to the stationary part and a secondary coil mounted on the rotary table, transferring power wirelessly through electromagnetic fields. This substitution eliminates mechanical wear and contact noise while maintaining power supply functionality.
Solution Approach 2:
The patent introduces resonant capacitors as intermediary components to enhance the electromagnetic coupling between the primary and secondary coils. The capacitors form resonant circuits that amplify the magnetic flux linkage, improving power transfer efficiency. This intermediary mechanism allows effective power transmission across the air gap without direct physical contact, resolving the contradiction between contactless operation and power supply reliability.
2Use of energy by moving object
If resonant capacitors are added to enhance electromagnetic induction efficiency, then power transfer efficiency improves, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent optimizes the electrical parameters of the resonant capacitors, including capacitance values and resonant frequencies, to maximize power transfer efficiency. By carefully selecting and tuning these parameters, the system achieves efficient wireless power transmission. The parameter optimization allows the use of standard capacitor components while maintaining high efficiency, balancing manufacturing ease with performance requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables contactless power supply to the rotary table, increasing the number of rotations and preventing contact noise, thus supporting more complex wafer processing operations without heat generation issues or resistance decreases.
Implementation Method 1
a load (28) connected to the rotary table-side secondary coil (26). In the contactless electric power supply mechanism for a rotary table, the load (28) is supplied with electric power via the rotary table-side secondary coil (26) by electromagnetic induction
Implementation Method 2
A first resonant capacitor (32) connected to the fixed-side primary coil (22); and a second resonant capacitor (34) connected to the rotary table-side secondary coil (26)
Data Source
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AI summary
Provided are a contactless electric power supply mechanism and method for a rotary table, and a wafer rotating and holding device, which enable a load connected to the rotary table of the wafer rotating and holding device to be contactlessly supplied with electric power. The contactless electric power supply mechanism for a rotary table of a wafer rotating and holding device comprises: a rotary shaft; a rotary table, which is placed on an end of the rotary shaft, and is configured to hold a wafer on an upper surface of the rotary table; a drive motor configured to supply motive power to the rotary shaft; a fixed-side primary coil wound around the rotary shaft; an electric power supply source connected to the fixed-side primary coil; a rotary table-side secondary coil, which is provided so as to correspond to the fixed-side primary coil and be separated from the fixed-side primary coil by a predetermined distance, and is mounted to the rotary table; and a load connected to the rotary table-side secondary coil. In the contactless electric power supply mechanism for a rotary table, the load is supplied with electric power via the secondary coil by electromagnetic induction.