Contactor Assembly Temperature Control for Stable Semiconductor Testing
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Solution Overview
Problem
Existing temperature control systems for testing devices, such as semiconductors, face challenges in accurately maintaining setpoint temperatures due to variations in device heat production and ambient conditions, leading to inaccurate test results.
Innovation Solution
A temperature control system comprising a controller, contactor assemblies with channel systems, and valves that adjust fluid flow to maintain setpoint temperatures by comparing the temperature of contacts within the system to a setpoint, using inlet and exhaust valves to control heating or cooling as needed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual air pathway control is used to adjust fluid flow for temperature control, then the system structure remains simple, but temperature control precision deteriorates due to inability to dynamically respond to heat fluctuations
Solution Approach 1:
The patent replaces manual mechanical air pathway control with an automated electronic control system. The controller receives temperature signals from sensors and automatically adjusts fluid flow through contactor assemblies, substituting manual mechanical operation with electronic control to achieve precise temperature regulation.
Solution Approach 2:
The patent implements a feedback control system where temperature sensors continuously monitor the temperature of devices under test, send signals to the controller, which then adjusts fluid flow through exhaust valves to maintain setpoint temperature. This closed-loop feedback mechanism enables dynamic response to heat fluctuations.
2Use of energy by moving object
If thin heater is used to heat devices during testing, then energy consumption is reduced, but temperature stability deteriorates when devices produce self-heat
Solution Approach 1:
The patent uses temperature sensors to continuously monitor device temperature and feeds this information back to the controller. When devices produce self-heat and temperature approaches the setpoint, the controller automatically reduces or shuts off the thin heater, preventing overheating while maintaining temperature stability through dynamic adjustment.
Solution Approach 2:
The system allows devices to serve their own temperature regulation needs by producing heat during operation. The control system monitors device temperature and adjusts heating accordingly, enabling devices to self-regulate temperature through their own operational heat generation rather than relying on continuous external heating.
3Stability of the object's composition
If fluid flow is not dynamically controlled through contactor assemblies, then system complexity is reduced, but temperature uniformity across multiple contacts deteriorates
Solution Approach 1:
The patent divides the fluid flow control system into multiple independent contactor assemblies, each with its own exhaust valve and temperature sensor. This segmentation allows independent control of fluid flow to each contactor, enabling uniform temperature distribution across multiple contacts while managing complexity through modular design.
Solution Approach 2:
The patent implements local temperature control by equipping each contactor assembly with individual temperature sensors and control valves. This allows localized adjustment of fluid flow to specific contactors based on their individual temperature conditions, ensuring temperature uniformity across the entire system despite variations in local heat generation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system effectively maintains setpoint temperatures, enhancing the accuracy and efficiency of device testing by dynamically adjusting fluid flow to manage heat fluctuations, thereby improving test reliability and throughput.
Implementation Method 1
flow of fluid through one or more of the contactor assemblies may be based on a temperature of contacts of a second contactor assembly and/or a temperature of contacts of the first contactor assembly
Data Source
AI summary
A method for controlling temperature in a temperature control system. The method includes providing a temperature control system including a controller, a first contactor assembly having a first channel system, a plurality of first contacts, each of the first contacts including a portion that is disposed within the first channel system, and one or more of a first exhaust valve or a first inlet valve, and a second contactor assembly having a second channel system, a plurality of second contacts, each of the second contacts including a portion that is disposed within the second channel system, and one or more of a second exhaust valve or a second inlet valve. The method also includes receiving, by the first contactor assembly, a fluid at a first temperature. The method also includes receiving, by the second contactor assembly, the fluid at the first temperature.