Contactor Tip Position Adjustment for Semiconductor Wafer Inspection
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Solution Overview
Problem
The increasing fineness of wiring patterns and electrode pads on semiconductor wafers complicates probe position adjustments, requiring a more precise and operator-independent method for initial probe positioning to avoid damage and ensure inspection quality.
Innovation Solution
An inspection apparatus with a position adjusting unit that includes a contactor, a load detecting section, and a position deriving section to automatically adjust the probe's tip position based on contact load and displacement, allowing precise initial positioning without relying solely on operator sense.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual position adjustment by operator is used, then the device complexity is low, but the manufacturing precision and measurement precision deteriorate due to difficulty in grasping micrometer-level movements
Solution Approach 1:
The patent replaces the manual mechanical adjustment system with an automated system that uses a load sensor to detect contact force and a drive unit to automatically adjust the probe tip position. The control unit processes load sensor signals to calculate required position corrections and executes automated adjustment, eliminating the need for operator manual manipulation and achieving micrometer-level positioning precision.
Solution Approach 2:
The system enables self-adjustment by using the load sensor to automatically detect when the probe tip contacts the electrode pad and by how much, then the control unit autonomously calculates and executes the necessary position correction without operator intervention. The probe positioning system serves itself by using its own sensory feedback to make precise adjustments.
2Reliability
If operator sense-based adjustment is used, then the ease of operation is high, but the reliability deteriorates due to risk of probe or electrode pad damage
Solution Approach 1:
The system incorporates a load sensor that provides real-time feedback on the contact force between the probe tip and electrode pad. The control unit continuously monitors this feedback signal and automatically adjusts the probe position to maintain optimal contact force, preventing both insufficient contact and excessive force that could cause damage. This closed-loop feedback mechanism ensures reliable and safe operation.
Solution Approach 2:
The system prevents damage before it occurs by using the load sensor to detect approaching contact and the control unit to preemptively adjust the probe position. The automated system anticipates potential damage scenarios and corrects positioning in advance, cushioning against harmful effects before they manifest.
3Productivity
If automatic position adjustment is implemented, then the productivity is improved, but the device complexity increases due to additional sensors and control systems
Solution Approach 1:
The control unit serves multiple functions: it processes load sensor signals, calculates position corrections, controls the drive unit, and manages the overall positioning process. The load sensor not only detects contact force but also provides information about contact timing and magnitude. This multi-functionality reduces the need for separate dedicated components for each function.
Solution Approach 2:
The patent merges the detection function (load sensor) with the control function (control unit) and the actuation function (drive unit) into an integrated automated positioning system. The control unit combines signal processing, calculation, and actuation control in a single coordinated system, reducing overall system complexity compared to having separate independent systems for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-precision initial position adjustments of the probe, reducing the risk of damage and improving inspection quality by automating the Z-direction positioning process.
Implementation Method 1
a load detecting section that detects a value of contact load between the contactor and the electrode
Data Source
AI summary
An inspection apparatus makes an inspection of electrical characteristics of an object to be inspected using a contactor brought into electrical contact with an electrode of the object to be inspected, the inspection apparatus including: a position adjusting unit including the contactor, a position adjusting section that adjusts a tip position of the contactor, and a load detecting section that detects a value of contact load between the contactor and the electrode; a position deriving section that derives an initial position of the contactor in a specific direction based on a relationship between an amount of contact displacement of the contactor in the specific direction and the value of contact load between the contactor and the electrode; and a movement performing section that moves the tip position of the contactor based on the initial position in the specific direction derived by the position deriving section.