Semiconductor Container Door Locking Mechanism Against Vibration Rotation
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Solution Overview
Problem
The existing door latch mechanisms in semiconductor containers are prone to accidental rotation due to vibrations during fabrication or transportation, leading to misalignment of the keyhole and potential door detachment issues.
Innovation Solution
The proposed door locking mechanism incorporates stop structures on the door panel and the holding member, which limit the movement and rotation of the rotating member, preventing unexpected movement and rotation caused by vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a turntable-based latch mechanism is used to lock the door, then the door can be locked and unlocked with the pod, but vibrations during fabrication or transportation cause the turntable to move and rotate, leading to keyhole misalignment and potential door detachment
Solution Approach 1:
The patent applies preliminary anti-action by introducing stop structures (first stop structure on the rotating member and second stop structure on the door panel) that preemptively prevent the rotating member from rotating beyond a predetermined angle. These stop structures are positioned in advance to counteract the harmful rotational movement caused by vibrations, thereby preventing keyhole misalignment and door detachment before they can occur
Solution Approach 2:
The patent uses an elastic member as an intermediary element between the rotating member and the stop structures. The elastic member absorbs and dampens the vibrational forces transmitted to the rotating member, reducing the impact of external vibrations and preventing the turntable from rotating unintentionally while still allowing controlled rotation for locking and unlocking operations
2Reliability
If the turntable rotates significantly due to vibration, then the latch unlocks and the door falls off, but adding restraint mechanisms increases device complexity
Solution Approach 1:
The patent merges the stop structures directly into the existing latch mechanism components - the first stop structure is formed on the rotating member itself and the second stop structure is formed on the door panel. This integration approach prevents door detachment without adding separate, complex restraint mechanisms, as the stop functions are combined with the existing structural elements of the latch system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents accidental rotation of the rotating member, ensures correct key alignment, and prevents the door from falling off the container, thereby ensuring reliable operation and maintaining cleanliness in semiconductor containers.
Implementation Method 1
The elastic member is disposed between the holding member and the rotating member. The elastic member is elastically compressed when a force is applied to the holding member, and the second stop structure of the holding member detaches from a limitation state with the first stop structure for allowing a rotating operation of the rotating member. The elastic member elastically restores when the force is removed from the holding member, and the second stop structure returns to the limitation state with the first stop structure for limiting the rotating operation of the rotating member.
Data Source
AI summary
A door locking mechanism and semiconductor container using the same include door panel, cover, and locking module. The door panel has a first stop structure. The cover and the door panel define an accommodating space for receiving the locking module. The locking module includes rotating member, holding member, and elastic member. The elastic member is disposed on the holding member and has a second stop structure near the first stop structure. The elastic member is disposed between the holding and the rotating member. The elastic member is compressed when a force is applied to the holding member, and the second stop structure detaches from a limitation state with the first stop structure for allowing a rotating operation of the rotating member. The elastic member elastically restores when the force is removed, and the second stop structure returns to the limitation state for limiting the rotating operation.