Container Storage Layout for Lid Gas Leak Capture
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Solution Overview
Problem
Conventional container storage apparatuses for semiconductor wafers have a complex configuration due to large suckers designed to capture gas leaking from container lids, which complicates the setup and increases size.
Innovation Solution
A container storage apparatus with a mounting table and side wall that encloses containers, featuring a sucker with openings in the bottom face and side wall to collect gas leaking from the lid, reducing the sucker's size and simplifying the configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the sucker opening is made larger than the lid to capture leaking gas, then gas collection efficiency is improved, but the sucker size and device complexity increase
Solution Approach 1:
The invention transitions from horizontal gas capture (requiring large opening) to vertical gas capture by positioning the sucker beneath the container. This dimensional change allows the sucker opening to be smaller than the lid while still effectively capturing leaking gas through the bottom approach, resolving the contradiction between collection efficiency and device size.
Solution Approach 2:
Instead of positioning the sucker above or at the same level as the lid to capture gas horizontally, the invention inverts the approach by placing the sucker below the container and capturing gas that leaks downward. This inversion allows for a smaller sucker opening while maintaining effective gas collection, thereby reducing device complexity.
2Stability of the object's composition
If the side wall height is increased to improve container stability, then container positioning is improved, but the apparatus complexity and space requirements increase
Solution Approach 1:
The side wall is designed to provide stability through its basic structural presence rather than through complex mechanisms. By simply extending upward from the mounting table, the side wall naturally provides container support and stability without requiring additional components or complex configurations, thus achieving stability while minimizing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves efficient gas collection with a simpler design, minimizing the number of components and preventing gas diffusion while ensuring containers are securely held, reducing manufacturing costs and improving operational efficiency.
Implementation Method 1
a sucker that sucks gas leaking from the container
Implementation Method 2
a sucker that sucks gas leaking from the container
Data Source
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AI summary
[Problem] To provide a container storage apparatus capable of sucking gas leaking from a lid of a container with a simpler configuration than conventional ones. [Means to Solve Problem] A container storage apparatus 10 comprises: a mounting table 20 on which a container 1 having a lid 1c on a side face thereof is mounted; a purger 10 that supplies a purge gas to the container 1; and a sucker 30 that sucks gas leaking from the container 1. The mounting table 20 includes a bottom face 21 on which the container 1 is mounted, and a side wall 23 extending upward from the bottom face and facing the lid of the container mounted on the bottom face. The sucker 30 sucks gas leaking from a side face of the container 1 where the lid 1c is located through a first opening 50 provided in the bottom face 21 or the side wall. An upper end 23 of the side wall 23 is lower than an upper end 1h of the lid 1c of the container 1 mounted on the bottom face 21.