Container Pressing Mechanism for Differential Pressure Stability
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Solution Overview
Problem
Conventional thermal processing apparatuses are not resistant to differential pressure, leading to displacement of containers, mapping errors, and increased oxygen concentration in the loading area, which affects Turn Around Time and contaminates the inert gas atmosphere.
Innovation Solution
A processing apparatus with a pressing mechanism that includes a horizontally turning pressing arm and a drive cylinder to press the container's flange part onto the partition wall, improving resistance to differential pressure and maintaining container stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the container is placed on the table and the lid is opened after nitrogen gas replacement, then the atmosphere in the loading area can be kept cleaner and oxide film generation can be prevented, but the container is subjected to differential pressure between internal pressure of loading area and atmospheric pressure of carry-in area, causing the container to be swayed or displaced from the through-hole
Solution Approach 1:
The pressing mechanism applies a pressing force to the flange part of the container in advance, before the differential pressure acts on the container. This preliminary counteracting force prevents the container from being displaced by the subsequent differential pressure when the lid is opened, thus maintaining both atmosphere cleanliness and container stability
Solution Approach 2:
The pressing mechanism generates a counteracting force that balances the differential pressure acting on the container. By applying this opposing force through the pressing arm and pressing member, the system neutralizes the disruptive effect of pressure differential, preventing container displacement while maintaining the inert atmosphere
2Stability of the object's composition
If the container is pressed onto the partition wall by a contact drive part, then the container can be held stable, but the structure becomes more complex and the operation space above the container is reduced
Solution Approach 1:
The pressing mechanism utilizes the vertical dimension by applying downward pressing force from above onto the flange part of the container. This vertical pressing action effectively stabilizes the container against horizontal differential pressure forces, adding a dimensional aspect to the stabilization approach without requiring complex lateral mechanisms
Solution Approach 2:
The pressing mechanism is divided into distinct functional components: the pressing arm that provides leverage, the pressing member that contacts the flange part, and the drive mechanism. This segmentation allows each component to be optimized independently and simplifies the overall structure by assigning specific functions to separate elements
3Manufacturing precision
If the container is displaced from the through-hole due to differential pressure, then mapping error of wafers and transfer mistake occur, but adding pressing mechanism increases device complexity
Solution Approach 1:
The pressing mechanism secures the container in the correct position through the through-hole before the wafer transfer process begins. By establishing proper container positioning in advance, the system prevents mapping errors and transfer mistakes that would otherwise occur due to differential pressure-induced displacement during subsequent operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces container displacement, prevents oxygen concentration increase, and enhances processing efficiency by maintaining a stable inert gas atmosphere, thereby improving throughput and reducing contamination risks.
Implementation Method 1
a drive part joined to the pressing arm, the drive part being configured to drive to turn the pressing arm
Data Source
AI summary
A processing apparatus including: a carry-in area into which a container containing substrates to be processed is carried, the container having a flange part on an upper part thereof and an opening in a front surface thereof, with a lid being detachably fixed to the opening; a transfer area whose atmosphere is maintained differently from an atmosphere of the carry-in area; a partition wall separating the carry-in area and transfer area; a through-hole formed in the partition wall; a door configured to open and close the through-hole; and a table on which the container can be placed in the carry-in area. After the container has been placed and then held on the table, the container is brought into contact with the through-hole, the door and the lid are opened, and the substrates to be processed in the container are conveyed to the transfer area so as to process the substrates.