Closed Container Pressure Monitoring with Sleep Mode
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Solution Overview
Problem
Existing closed containers for storing photomasks in semiconductor manufacturing processes lack effective monitoring and maintenance of reduced pressure conditions, leading to contamination and operational issues during storage and transfer.
Innovation Solution
A closed container equipped with a vacuum sensor unit, including a pressure sensor, radio communication module, controller, and battery, allowing for continuous or command-based pressure measurement and data transmission, enabling remote monitoring and adjustment of internal pressure conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a closed container without an evacuation system is used to store photomasks, then the container structure is simple and cost-effective, but the internal pressure cannot be monitored or maintained, leading to contamination and vacuum degradation
Solution Approach 1:
The vacuum monitoring and control functions are segmented into separate modular components: a pressure sensor unit, a microcomputer control unit, and an evacuation system. This allows the container to maintain reliability through dedicated vacuum management while keeping the overall structure relatively simple and cost-effective.
Solution Approach 2:
A microcomputer control unit acts as an intermediary between the pressure sensor and the evacuation system. It receives pressure data, processes it, and triggers evacuation operations when needed, enabling automated vacuum maintenance without requiring direct complex integration between sensing and evacuation components.
2Reliability
If continuous pressure monitoring is implemented in the container, then vacuum conditions can be maintained, but battery consumption increases and operational lifespan decreases
Solution Approach 1:
The pressure monitoring system operates periodically rather than continuously. The microcomputer control unit checks pressure data at predetermined intervals and only activates the evacuation system when the pressure exceeds a threshold, significantly reducing battery consumption while maintaining adequate vacuum monitoring.
Solution Approach 2:
The system automatically monitors pressure and triggers evacuation operations when needed without requiring constant external intervention. The microcomputer control unit autonomously manages the balance between monitoring frequency and battery conservation, extending operational lifespan.
3Ease of manufacture
If the container is left without active vacuum maintenance, then device complexity and cost are reduced, but contamination occurs and vacuum degradation affects photomask quality
Solution Approach 1:
The pressure sensor provides continuous feedback about the internal vacuum conditions to the microcomputer control unit. When the pressure indicates vacuum degradation, the system automatically triggers the evacuation mechanism, maintaining photomask quality without requiring complex active vacuum maintenance infrastructure.
Solution Approach 2:
The container system autonomously detects and corrects vacuum degradation through its integrated sensor and control mechanisms, protecting against contamination without requiring external intervention or complex maintenance protocols.
4Loss of information
If pressure data transmission is performed continuously, then real-time monitoring is achieved, but energy consumption increases and battery life decreases
Solution Approach 1:
Pressure data transmission is performed periodically at predetermined intervals rather than continuously. The microcomputer control unit transmits data to the external terminal device only when scheduled or when significant changes occur, ensuring real-time monitoring capability while minimizing energy consumption from the battery-powered transmission unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient management and control of internal pressures in multiple containers, preventing contamination and ensuring optimal storage conditions, even when containers are not actively connected, by minimizing battery consumption and extending battery life through sleep and active modes.
Implementation Method 1
a pressure sensor capable of measuring a pressure inside the closed container
Implementation Method 2
a battery capable of supplying an energy to the pressure sensor, the controller, and the transmission unit
Data Source
AI summary
A closed container in which a reticle etc. is stored and kept is provided with a pressure sensor, transmission means for transmitting data on the pressure, a controller that controls the operation of them, and a battery serving as a power source of the above elements. The controller has a sleep mode in which it causes the transmission means to transmit the data on the pressure at regular intervals and an active mode in which it causes the transmission means to transmit the data on the pressure when necessary in response to an externally supplied command. By the above described configuration, the pressure in the interior of the container can be checked appropriately.