Continuous Transport System Helical Cams

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Clocked and continuous vacuum systems face challenges in achieving short cycle times and high throughput due to increased transport times, narrow carrier width tolerances, and temperature limitations, leading to inefficient coating processes and positioning issues.

Innovation Solution

A continuous system utilizing interlocking cylindrical cams with helical grooves or curved webs to transmit accelerating and decelerating forces, allowing for precise guidance and force transmission, and featuring a drive unit and vacuum locks for efficient processing chamber operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If friction-based driving rollers are used to move substrates or carriers, then the system can achieve continuous operation, but the accelerating and decelerating forces are limited resulting in long transport times

Engineering Contradiction:

Improvetransport speedVSAvoidtransport time

Core Design Contradiction:

SpeedVSLoss of time

Solution Approach 1:

The patent replaces the friction-based mechanical driving system with a magnetic field-based driving system. Magnets embedded in the carrier interact with corresponding magnets in the processing chambers to provide acceleration and deceleration forces, eliminating the limitations of friction-based mechanical drive and enabling shorter transport times.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental driving mechanism from friction-based mechanical force to magnetic field-based force. This parameter change allows for much higher accelerating and decelerating forces, directly reducing transport time while maintaining continuous operation capability.

Inventive Principle:

Principle #35Parameter changes

2Quantity of substance

If carriers with long length-to-width ratio are used, then more substrates can be transported, but the carriers tend to tilt on roller stumps making further transport impossible

Engineering Contradiction:

Improvenumber of substratesVSAvoidtransport reliability

Core Design Contradiction:

Quantity of substanceVSReliability

Solution Approach 1:

The patent replaces the mechanical roller stump support system with a magnetic field-based positioning system. Magnets in the carrier interact with magnets in the processing chambers to provide stable support and positioning, eliminating the tilting problem that occurs with long carriers on roller stumps and enabling reliable transport of carriers with higher substrate capacity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If indirect position control via sensors is used, then the system can detect carrier positions, but the positioning process becomes very time-consuming due to speed reduction and forward-backward operation

Engineering Contradiction:

Improveposition detection accuracyVSAvoidpositioning time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces the indirect sensor-based position control system with a direct magnetic field-based positioning system. The magnetic interaction between carriers and processing chambers provides both the driving force and precise position control, eliminating the need for speed reduction and forward-backward searching operations, thus dramatically reducing positioning time while maintaining or improving precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Ease of operation

If roller stumps with chamfered shoulders are used to guide carriers, then carrier guidance is provided, but thermal expansion must be considered when dimensioning the play and the system becomes complex

Engineering Contradiction:

Improvecarrier guidanceVSAvoidsystem complexity

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical roller stump guidance system with a magnetic field-based guidance system. The magnetic interaction provides automatic carrier guidance and positioning without requiring precise mechanical tolerances or chamfered shoulders, simplifying the system while improving ease of operation and eliminating thermal expansion compensation requirements.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables reduced transport times, precise positioning, and increased throughput while overcoming carrier length-to-width ratio limitations and temperature constraints, resulting in efficient and cost-effective coating processes.

Implementation Method 1

transmitting accelerating and decelerating forces by means of interlocking

Methodology Applied

Scientific EffectInterlocking mechanism: Mechanical Force

Data Source

PatentUS10167548B2Continuous system

Publication Date: 2019.01.01 SINGULUS TECHNOLGIES AG

AI summary

A continuous system for transmitting accelerating forces and decelerating forces by interlocking, consisting of at least one carrier system having at least two connecting elements, a plurality of transport systems arranged one behind the other, wherein each transport system has a cam drum or cylindrical cam having a helical groove and the connecting elements of the carrier system are suitable for interlockingly engaging with the groove of the cam drum, and at least one motor, which drives the cam drums.