Continuous Tow Processing System for Ceramic Fiber Coating

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The existing methods for depositing coatings on ceramic fibers, such as SiC-based fibers, are time-consuming and costly due to the need for multiple sequential coating processes using individual deposition systems, which are inefficient and prone to damage and serviceability issues.

Innovation Solution

A continuous tow processing system that includes a series of fluidly coupled process chambers and robotic assemblies to continuously process and coat a tow material, allowing for the deposition of multiple layers, such as boron nitride, silicon boron nitride, and silicon nitride, without the need for vacuum breaks and sequential transfers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If multiple sequential coating processes are used with individual deposition systems, then multiple coating layers can be deposited on ceramic fibers, but the processing time increases and efficiency decreases

Engineering Contradiction:
Improvecoating qualityVSAvoidprocessing efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent combines multiple individual deposition systems into a single integrated continuous processing system. Multiple coating chambers are connected in series to form one continuous processing line that deposits multiple coating layers on ceramic fibers in a single pass, eliminating the need for sequential transfers between separate systems.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements continuous processing where ceramic fibers pass through multiple coating chambers without interruption. The system maintains continuous vacuum and continuous material flow, eliminating vacuum breaks and repositioning operations that would interrupt the coating process, thereby significantly improving processing efficiency.

Inventive Principle:
Principle #20Continuity of useful action

2Manufacturing precision

If multiple sequential coating processes are used with individual deposition systems, then multiple coating layers can be deposited on ceramic fibers, but the processing cost increases

Engineering Contradiction:
Improvecoating qualityVSAvoidprocessing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent combines multiple individual deposition systems into a single integrated continuous processing system. Multiple coating chambers are connected in series to form one continuous processing line that deposits multiple coating layers on ceramic fibers in a single pass, eliminating the need for sequential transfers between separate systems.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If multiple sequential coating processes are used with individual deposition systems, then multiple coating layers can be deposited on ceramic fibers, but the risk of fiber damage increases

Engineering Contradiction:
Improvecoating qualityVSAvoidfiber integrity
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent implements continuous processing where ceramic fibers pass through multiple coating chambers without interruption. The system maintains continuous vacuum and continuous material flow, eliminating vacuum breaks and repositioning operations that would interrupt the coating process and potentially damage the fibers.

Inventive Principle:
Principle #20Continuity of useful action

4Manufacturing precision

If multiple sequential coating processes are used with individual deposition systems, then multiple coating layers can be deposited on ceramic fibers, but the system complexity increases

Engineering Contradiction:
Improvecoating qualityVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple individual deposition systems into a single integrated continuous processing system. Multiple coating chambers are connected in series to form one continuous processing line that deposits multiple coating layers on ceramic fibers in a single pass, eliminating the need for sequential transfers between separate systems.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system significantly improves the efficiency, reduces costs, and minimizes damage by enabling continuous processing of ceramic fibers with multiple coatings, enhancing the mechanical, thermal, and chemical properties of the fibers while reducing the risk of damage and improving serviceability.

Implementation Method 1

Chemical vapor infiltration (CVI) is used to produce an environmental barrier in the form of a thin conformal encapsulation layers on ceramic fibers

Methodology Applied
Scientific EffectChemical vapor infiltration: Chemical Vapour Deposition

Implementation Method 2

depositing coatings on a tow material, such as fiber, using for example directed vapor deposition or chemical vapor infiltration

Methodology Applied
Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentUS11578004B2Methods and apparatus for depositing materials on a continuous substrate
Publication Date: 2023.02.14 APPLIED MATERIALS INC
  • US11578004B2 patent drawing
  • US11578004B2 patent drawing
  • US11578004B2 patent drawing

AI summary

Methods and apparatus for depositing material on a continuous substrate are provided herein. In some embodiments, an apparatus for processing a continuous substrate includes: a first chamber having a first volume; a second chamber having a second volume fluidly coupled to the first volume; and a plurality of process chambers, each having a process volume defining a processing path between the first chamber and the second chamber, wherein the process volume of each process chamber is fluidly coupled to each other, to the first volume, and to the second volume, and wherein the first chamber, the second chamber, and the plurality of process chambers are configured to process a continuous substrate that extends from the first chamber, through the plurality of process chambers, and to the second chamber.