Control Plate Flow Paths for High-Conductance Valve Shut-Off
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Solution Overview
Problem
Existing fluid control valves face challenges in achieving high conductance while maintaining leak-tight shut-off and proportional control, especially in applications requiring high purity and fast acting proportional control, such as semiconductor manufacturing.
Innovation Solution
A high purity fluid control valve design featuring a moveable control plate with flow-through passages, including radial and axial fluid paths, that allows for nested orifice ridges to increase conductance with minimal actuator movement, ensuring efficient fluid flow and shut-off by using a control plate with a continuous uninterrupted flat portion to bridge orifice ridge segments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional valve design is used, then the structure is simple, but the conductance is limited and dead space is large
Solution Approach 1:
The patent implements nested orifice ridges where multiple concentric circular ridges are positioned one inside another within the valve chamber. This nesting arrangement allows multiple flow paths to coexist in a compact space, dramatically increasing conductance without proportionally increasing the valve size or structural complexity
Solution Approach 2:
The valve chamber is segmented into multiple regions by the concentric orifice ridges, creating distinct flow channels. The control plate is also segmented with multiple flow-through passages that align with these ridges, allowing independent control of different flow paths while maintaining overall system simplicity
2Reliability
If the control plate blocks all fluid paths for shut-off, then leak-tight shut-off is achieved, but internal dead space increases causing fluid stagnation
Solution Approach 1:
The patent extracts the problematic stagnant fluid from the system by incorporating flow-through passages that extend through the control plate. Even when the valve is in the closed position, these passages provide a direct path for fluid to bypass the control plate, eliminating dead space and preventing stagnation while the main shut-off function remains intact
Solution Approach 2:
The flow-through passages act as intermediary channels that allow fluid to pass through the control plate itself rather than being blocked. This mediator structure enables the control plate to maintain its shut-off function for the main flow paths while simultaneously providing a bypass route that prevents fluid stagnation in the valve chamber
3Productivity
If nested orifice ridges are used to increase conductance, then fluid flow efficiency improves, but manufacturing complexity increases
Solution Approach 1:
The patent combines multiple orifice ridge structures into a single integrated component rather than manufacturing separate ridges and assembling them. This merging approach allows the concentric ridges to be formed simultaneously using processes like precision casting or CNC machining, reducing manufacturing steps and complexity while maintaining the high conductance benefits of the nested configuration
4Reliability
If the control plate has a continuous flat portion for shut-off, then sealing performance improves, but the ability to allow fluid sweep is reduced
Solution Approach 1:
The control plate is designed with different local qualities: a continuous uninterrupted flat portion that contacts the orifice ridges to provide reliable shut-off sealing, and simultaneously incorporates flow-through passages that allow fluid to pass through. This local differentiation enables the same component to excel at both sealing and fluid sweep functions without compromise
Data Source
AI summary
A high purity control valve for use in high conductance, proportional control applications includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. Nested orifice ridges are used to achieve high conductance with small actuator movement. Enhanced leak tightness can be provided by incorporating into the control plate materials softer than the material comprising the orifice ridge. The control plate comprises a control plate body having a counterbore in fluid communication with a conduit, radial fluid flow paths and axial fluid flow paths. A flat side of the control plate includes a continuous uninterrupted flat portion to shut-off fluid flow in the valve. The radial fluid flow paths provide fluid communication from the counterbore to a circumferential perimeter of the control plate and the axial fluid flow paths provide fluid communication with the fluid conduit through an intermediate valve chamber portion.