Manufacturing Controller IO Handling for Chamber-Stable Software Updates
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Solution Overview
Problem
Software updates for manufacturing system controllers cause significant downtime and environmental deterioration of process chambers, leading to reduced productivity and increased latency due to the time required to restore conditions post-update.
Innovation Solution
Implementing an IO module that handles IO communications during updates, transferring notifications between components and a system update module to maintain chamber conditions, allowing continuous operation and reducing the time needed to restore the environment post-update.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If software update is performed on system controller, then new functionality is integrated or errors are remedied, but process chamber must be shut down and environment deteriorates causing significant downtime
Solution Approach 1:
The patent segments the controller software into multiple independent images (first software image and second software image) that can be executed alternately. This allows the system to switch between different software versions without shutting down the process chamber, enabling continuous manufacturing while software updates are applied in the background.
Solution Approach 2:
The patent implements preliminary action by pre-loading a second software image into memory before the first software image needs to be updated. The system prepares the updated software in advance and validates it, so that when switching is needed, the transition can occur quickly without prolonged shutdown or environmental deterioration.
2Ease of manufacture
If process chamber is shut down for software update, then software can be updated, but it takes significant time to restore chamber conditions to acceptable level
Solution Approach 1:
The patent enables continuity of useful action by maintaining the process chamber in an operational state throughout the software update process. The dual software image architecture allows the chamber to continue processing substrates while one software image is being executed, eliminating the need to shut down and subsequently restore chamber conditions.
Solution Approach 2:
The patent changes the operational parameters of the controller by implementing a dual-image system where the system can switch between different software versions. This parameter change enables the chamber to maintain its operational parameters (temperature, pressure, etc.) continuously without the cycles of shutdown and restoration that would otherwise occur.
3Reliability
If traditional software update process is used, then update can be completed, but chamber environment deteriorates and requires restoration
Solution Approach 1:
The patent introduces dynamics into the software update process by implementing a flexible switching mechanism between two software images. The system can dynamically select which software image to execute based on validation results and operational needs, allowing the chamber environment to remain stable while software updates are applied adaptively in the background.
Solution Approach 2:
The patent uses a software image manager as an intermediary component that coordinates between the two software images and the process chamber. This intermediary validates and manages the switching between software versions, ensuring that chamber environment stability is maintained while software functionality is updated through controlled transitions.
Data Source
AI summary
Methods and systems for input/output (IO) handling during an update process for a manufacturing system controller are provided. A detection is made that process control instructions corresponding to a process recipe are to be updated. A set of notifications is transmitted between component(s) of the manufacturing system and a system update IO handler of the system controller. The notifications include commands which, upon execution, cause the manufacturing system component(s) to maintain an environment of the manufacturing system at a target condition while the process control instructions are updated. Following a completion of the update and upon determining that the condition of the environment satisfies one or more criteria associated with the target condition, additional notifications are transmitted between the component(s) and a system process IO handler to initiate performance of a process at the manufacturing system.