Controller Standby State Management for Semiconductor Processing Systems

Solution Overview

Problem

The existing semiconductor processing systems require lengthy preparatory processes and significant downtime for software updates, leading to inefficiencies and increased costs due to the need to shut down and restart end devices, which affects the overall process efficiency and productivity.

Innovation Solution

A processing system with a controller that can select between a shutdown state and a standby state, allowing end devices to remain operational or ready for use during software updates, reducing the need for preparatory processes and minimizing downtime by storing and referencing I/O information for seamless restarts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the computer is shut down for software version-up, then the software can be updated, but the whole processing system needs to be stopped and power supplies of end devices must be shut down, causing increased downtime and decreased process efficiency

Engineering Contradiction:

Improvesoftware update capabilityVSAvoidprocess efficiency

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The system divides the processing system into two independent parts: the computer (controller) and the end devices. This segmentation allows the computer to be shut down for software updates while end devices remain operational, eliminating the need to stop the entire system and thus maintaining productivity during software updates

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system performs preliminary actions by saving the operational state of end devices before the computer is shut down. This includes storing process parameters, operational modes, and other critical information so that end devices can be quickly restored to their previous state after the computer restarts, minimizing downtime

Inventive Principle:

Principle #10Preliminary action

2Reliability

If end devices are shut down during controller shutdown, then the system can be safely maintained, but preparatory processes are required to recover end devices to operable condition, increasing non-operation time

Engineering Contradiction:

Improvesystem stabilityVSAvoidnon-operation time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The system performs preliminary actions by saving the operational state of end devices before the computer is shut down. This includes storing process parameters, operational modes, and other critical information so that end devices can be quickly restored to their previous state after the computer restarts, minimizing downtime

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system creates a copy of the end device operational state and stores it in the computer's memory. When the computer restarts after a software update, it retrieves this copied state information and uses it to quickly restore the end devices to their operational condition without requiring lengthy preparatory processes

Inventive Principle:

Principle #26Copying

3Manufacturing precision

If multiple preparatory processes are performed before restarting end devices, then the end devices can be recovered to operable condition, but the preparation time takes about half a day or one day, significantly increasing downtime

Engineering Contradiction:

Improveend device operational readinessVSAvoidpreparation time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The system performs preliminary actions by saving the operational state of end devices before the computer is shut down. This includes storing process parameters, operational modes, and other critical information so that end devices can be quickly restored to their previous state after the computer restarts, minimizing downtime

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system implements a feedback mechanism where the computer continuously monitors and saves the operational state of end devices. This feedback loop ensures that when the computer restarts, it has accurate, up-to-date information about the end device states, enabling rapid restoration without requiring lengthy preparatory verification processes

Inventive Principle:

Principle #23Feedback

Data Source

PatentUS8612038B2Target object processing system and method of controlling the same

Publication Date: 2013.12.17 TOKYO ELECTRON LTD

AI summary

A processing system for performing a predetermined process on a target object includes one or more processing apparatuses that process the target object and a controller that controls the processing apparatuses. Here, the controller performs a control to select any one of a shutdown state in which a multiple number of end devices of the processing apparatuses are all stopped and a standby state in which some or all of the end devices are ready to perform a process on the target object, when the controller is shut down.