Convex Stage Geometry for Particle Control in Laser Crystallization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing manufacturing processes for display devices using silicon thin film transistors face inefficiencies due to the challenge of controlling foreign matter in the chamber, which affects the reliability and yield of the laser irradiation process, particularly when crystallizing amorphous silicon thin films into crystalline silicon.
Innovation Solution
A manufacturing apparatus with a stage design featuring rounded side surfaces that are convex towards the outside, utilizing the Coanda effect to control the flow of particles and fine particles, and a laser module for irradiating a laser beam onto the substrate to crystallize the amorphous silicon thin film, thereby improving the process efficiency and reducing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional stage with flat side surfaces is used, then the structure is simple, but foreign matter accumulates on the substrate during laser irradiation
Solution Approach 1:
The stage side surfaces are designed with convex curved shapes instead of flat surfaces. This curvature creates a Coanda effect that directs gas flow along the stage surface, effectively sweeping foreign matter away from the substrate area during laser irradiation, thus improving process reliability without adding complex mechanical components
2Manufacturing precision
If the laser irradiation process is performed with conventional chamber design, then the process can be completed, but foreign matter contamination occurs on the substrate
Solution Approach 1:
The convex curved side surfaces of the stage are designed to utilize the Coanda effect, converting the gas flow that would normally carry foreign matter toward the substrate into a beneficial force that sweeps contaminants away from the substrate area, thus protecting the crystallization process from contamination
3Reliability
If amorphous silicon thin film is crystallized using laser irradiation, then polycrystalline silicon TFT with higher electron mobility is obtained, but foreign matter in the chamber affects the yield
Solution Approach 1:
The convex curved stage surfaces act as an intermediary element that modifies the gas flow pattern in the chamber. By creating a Coanda effect along the stage surfaces, the design establishes a protective flow pattern that prevents foreign matter from reaching the substrate, thereby improving product yield during the laser crystallization process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces the number of particles and fine particles on the substrate, enhancing the reliability and yield of the laser irradiation process by utilizing the Coanda effect to direct foreign matter away from the substrate, resulting in improved crystallinity and product quality.
Implementation Method 1
the amorphous silicon thin film may be crystallized by a laser beam irradiation method
Implementation Method 2
the amorphous silicon thin film may be crystallized by a laser beam irradiation method, a heating method or the like
Implementation Method 3
A manufacturing apparatus with a stage design featuring rounded side surfaces that are convex towards the outside, utilizing the Coanda effect to control the flow of particles and fine particles
Data Source
AI summary
A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.