Convex-Curved Substrate for Laser Alignment and Mirror Protection
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Solution Overview
Problem
Existing light-emitting devices with concave-curved reflecting mirrors face challenges in aligning the optical axis with a wiring substrate while protecting the concave-curved shape, particularly in mass production, due to high technical difficulty and potential etching damage.
Innovation Solution
A light-emitting device with a convex-curved substrate design, featuring a first convex portion in contact with the reflecting mirror and additional convex portions around it, allowing self-alignment and protection during manufacturing and mounting, utilizing a resist etch-back method to form convex portions with specific height and curvature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a concave-curved reflecting mirror is used in a surface-emitting laser, then the laser performance is improved, but the alignment precision with the wiring substrate deteriorates due to the complexity of positioning and protecting the concave-curved shape
Solution Approach 1:
The patent introduces an optically transparent substrate as an intermediary between the concave-curved reflecting mirror and the external environment. This substrate acts as a protective mediator that shields the fragile concave-curved mirror surface while allowing optical transmission, thereby preventing direct contact and potential damage during alignment and manufacturing processes
Solution Approach 2:
The patent forms convex portions on the optically transparent substrate before mounting the light-emitting device to the wiring substrate. These pre-formed convex portions serve as preliminary alignment features that guide the positioning process, enabling precise alignment without requiring complex real-time adjustment of the concave-curved mirror
2Reliability
If a concave-curved reflecting mirror is used, then the optical performance is improved, but the device complexity increases due to the need for additional protection structures and alignment mechanisms
Solution Approach 1:
The optically transparent substrate serves multiple functions simultaneously: it protects the concave-curved reflecting mirror, maintains the vacuum seal of the resonator, and provides a mounting surface with convex portions for alignment. This multi-functionality reduces the need for separate protective structures and alignment mechanisms
Solution Approach 2:
The patent combines the protective function, optical function, and alignment function into a single integrated structure - the optically transparent substrate with convex portions. This merging of functions simplifies the overall device structure by eliminating the need for separate protective housings and alignment fixtures
3Reliability
If traditional etching methods are used to protect the concave-curved reflecting mirror, then the mirror is protected, but the manufacturing difficulty increases and etching damage may occur
Solution Approach 1:
The patent creates convex portions on the optically transparent substrate that replicate the curvature profile of the concave-curved reflecting mirror. These convex portions serve as protective copies that provide mechanical support and protection without requiring direct etching of the mirror surface itself, thereby avoiding etching damage
Solution Approach 2:
The convex portions on the optically transparent substrate act as intermediary protective elements between the external environment and the concave-curved reflecting mirror. This intermediary structure provides protection through mechanical support rather than through etching-resistant coatings, simplifying the manufacturing process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise alignment with the wiring substrate and effective protection of the concave-curved reflecting mirror, reducing diffraction loss and stress-related issues, while simplifying the manufacturing process and avoiding aggravated roughness.
Implementation Method 1
performing reflow on the first resist layer and the one or more second resist layers shapes a surface of the first resist layer into a convex curve
Implementation Method 2
by performing dry etching using a resist etch-back method with the first resist layer and the one or more second resist layers subjected to the reflow as a mask
Implementation Method 3
a mounting position of the light-emitting device is determined by a self-alignment function of a convex curve of the second convex portion
Data Source
AI summary
A light-emitting device according to an embodiment of the present disclosure includes a laminate. The laminate includes an active layer, and a first semiconductor layer and a second semiconductor layer sandwiching the active layer. This light-emitting device further includes a current constriction layer having an opening and a vertical resonator including a first reflecting mirror having a concave-curved shape on the first semiconductor layer side and a second reflecting mirror on the second semiconductor side. The first reflecting mirror and the second reflecting mirror sandwich the laminate and the opening. This light-emitting device further includes an optically transparent substrate between the first reflecting mirror and the laminate. The optically transparent substrate has a first convex portion having a convex-curved shape and one or more second convex portions on a surface on the side opposite to the laminate. The first convex portion is in contact with the first reflecting mirror. The one or more second convex portions are provided around the first convex portion. The one or more second convex portions each have a height greater than or equal to a height of the first convex portion, and an end on the first reflecting mirror side has a convex-curved shape.