Conveyance Vehicle Sensor Alignment for Accurate Lateral Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conveyance vehicles in semiconductor manufacturing factories face challenges in accurately transferring articles due to bending caused by the weight of the up-and-down driver and sensor orientation changes during lateral movement, leading to deviations from the transfer position and incorrect detection wave application.
Innovation Solution
The conveyance vehicle includes an adjuster that adjusts the laterally moved amount and orientation of the sensor based on data tables to ensure accurate transfer and detection, using a flexible hanging-and-holding structure and actuators to correct the sensor's detection wave direction, considering the unique machine differences and transfer destinations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the up-and-down driver is laterally moved by the lateral mover, then the article can be transferred to different transfer destinations, but bending occurs in the lateral mover causing the article to deviate from the transfer position
Solution Approach 1:
The system performs preliminary action by determining the bending amount in advance for each transfer destination and storing correction data. The adjuster uses this pre-calculated data to correct the laterally moved amount before article transfer, preventing position deviation caused by bending.
Solution Approach 2:
The system implements feedback by measuring the actual bending of the lateral mover during lateral movement and using this information to adjust the laterally moved amount. The adjuster continuously monitors and corrects the position based on real-time bending conditions.
2Measurement precision
If the sensor orientation is changed to follow the up-and-down driver during lateral movement, then detection accuracy is maintained, but the detection wave may miss the indicator plate when the lowered amount increases
Solution Approach 1:
The system performs preliminary action by determining the appropriate sensor orientation in advance for each transfer destination and storing this data. The adjuster uses the pre-calculated orientation data to position the sensor correctly before detection, ensuring the detection wave reaches the indicator plate.
Solution Approach 2:
The system implements dynamics by making the sensor orientation adjustable and adaptable. The adjuster dynamically changes the sensor orientation based on the lateral movement amount and lowered amount, allowing the detection system to maintain accuracy across different operating conditions.
3Ease of operation
If fixed correction data is used for lateral movement adjustment, then the system is simple to operate, but the correction is inaccurate when the laterally moved amount changes
Solution Approach 1:
The system implements dynamics by transitioning from fixed correction data to variable correction data. The adjuster automatically selects and applies the appropriate correction amount based on the actual lateral movement distance and lowered amount, ensuring accurate correction for each specific operating condition.
Solution Approach 2:
The system performs self-service by automatically determining the correct correction data based on measured bending and movement parameters. The adjuster autonomously selects and applies the appropriate correction without requiring manual intervention, maintaining both simplicity and accuracy.
Data Source
AI summary
A conveyance vehicle includes a traveling driver, a main body, an up-and-down stage including a gripper to hold an article and capable of moving up and down with respect to the main body, an up-and-down driver to cause the up-and-down stage to move up and down by drawing out and winding up of belts, a lateral mover to cause the up-and-down driver while being cantilevered to protrude laterally of the main body, and an adjuster. In accordance with a laterally moved amount of the up-and-down driver by the lateral mover and a lowered amount of the up-and-down stage by the up-and-down driver, the adjuster performs one or both of adjustment of the laterally moved amount and adjustment of an orientation of a sensor included in the up-and-down driver to deliver the article to the transfer destination and to receive the article from the transfer destination.