Conveyance System Mode Switching for Semiconductor Apparatus Productivity
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Solution Overview
Problem
The existing conveyance systems in semiconductor manufacturing factories face challenges in optimizing the operating rate of semiconductor processing apparatuses, as they lack efficient control over the operations of ceiling conveyance vehicles and transfer mechanisms to prioritize supply and collection tasks based on system status.
Innovation Solution
A conveyance system with a controller that switches operation modes among three modes to prioritize supply, collection, or balance both, based on system status, ensuring efficient operation by restricting transfer operations and optimizing the use of conveyance vehicles and storage parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If both ceiling conveyance vehicle and transfer mechanism operate simultaneously to deliver conveyed objects, then the conveyance system can handle both supply and collection tasks, but the operating rate of semiconductor processing apparatus cannot be optimized due to lack of priority control
Solution Approach 1:
The controller dynamically switches between first operation mode and second operation mode based on the operational status of the semiconductor processing apparatus. When the apparatus is idle, the system operates in first mode prioritizing supply tasks. When the apparatus is processing, the system switches to second mode prioritizing collection tasks. This dynamic adaptation optimizes the operating rate without requiring complex manual control.
Solution Approach 2:
The controller receives feedback signals indicating whether the semiconductor processing apparatus is in an idle state or processing state. Based on this feedback, the controller automatically adjusts the operation mode of the conveyance system, switching between prioritizing supply operations and prioritizing collection operations. This feedback mechanism enables automatic optimization of apparatus operating rate.
2Adaptability or versatility
If transfer mechanism allows both transfer operations (apparatus port to storage part and storage part to apparatus port) simultaneously, then flexibility is improved, but the ability to prioritize supply or collection tasks is reduced
Solution Approach 1:
The transfer mechanism dynamically adjusts its operational flexibility by switching between first operation mode (prohibiting transfer to storage part) and second operation mode (prohibiting transfer from storage part). This dynamic restriction enables the system to prioritize either supply or collection tasks based on real-time needs, improving productivity while maintaining adaptability through mode switching.
3Ease of operation
If conveyance system operates without mode switching, then system operation is simpler, but the operating rate of apparatus cannot be optimized according to system status
Solution Approach 1:
The conveyance system performs self-service optimization by automatically switching between operation modes based on the status of the semiconductor processing apparatus. The controller autonomously determines whether to prioritize supply or collection tasks without requiring external intervention, thereby optimizing apparatus operating rate while maintaining operational simplicity.
Data Source
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AI summary
A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage part and the local vehicle that transfer a FOUP between the storage part and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage part by the local vehicle, a second mode prohibiting transfer to the storage part by any of the ceiling conveyance vehicles and transfer from the storage part to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.