Conveyance Apparatus Vibration Control via Sensor Fusion

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Solution Overview

Problem

Conventional conveyance apparatuses using moving-magnet type linear motors face issues with maintaining stable conveyance due to vibrations caused by differences in sensor outputs, which can lead to unfavorable behaviors such as mover vibration, affecting the accuracy of position and orientation detection.

Innovation Solution

A conveyance apparatus with a mover and stator configuration that includes multiple sensors along the conveyance direction to detect position information, and a control unit that corrects and controls the position and orientation of the mover based on relative sensor positions and detection times, using electromagnetic forces to manage the mover's movement and orientation with six-axis control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple sensors are used to detect position information, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improveposition detection accuracyVSAvoidsensor arrangement complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The stator is divided into multiple sensor units, each equipped with sensors at different positions. This segmentation allows each sensor to detect position information independently, and the control unit processes data from multiple sensors to achieve high-precision position detection while distributing the complexity across modular sensor units

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces the dimension of sensor spatial arrangement by positioning sensors at different locations within the stator. By detecting position information from multiple spatial dimensions and combining these measurements, the system achieves higher measurement precision while the control unit manages the complexity of processing multi-dimensional sensor data

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Speed

If sensor outputs are used directly for control, then response speed is improved, but stability deteriorates due to vibrations

Engineering Contradiction:
Improvecontrol response speedVSAvoidconveyance stability
Core Design Contradiction:
SpeedVSStability of the object's composition

Solution Approach 1:

The control unit continuously receives position information from multiple sensors, compares it with the target position, and adjusts the electromagnetic forces accordingly. This feedback mechanism allows rapid response to position deviations while maintaining stability by making incremental adjustments based on real-time sensor data from multiple sources

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The control unit dynamically adjusts electromagnetic force parameters based on position detection data. By changing the magnitude and direction of electromagnetic forces in response to detected position deviations, the system achieves fast response while the coordinated control of multiple electromagnetic forces maintains conveyance stability and reduces vibrations

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If electromagnetic forces are used for mover control, then manufacturing precision is improved, but energy consumption increases

Engineering Contradiction:
Improveposition control precisionVSAvoidelectromagnetic force energy consumption
Core Design Contradiction:
Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The control unit applies electromagnetic forces selectively and partially, generating forces only when and where needed to correct position deviations. By using electromagnetic forces only to the extent necessary for maintaining precise position control rather than continuous full-power operation, the system achieves high manufacturing precision while reducing overall energy consumption

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables stable and accurate conveyance by minimizing vibrations and ensuring precise control of the mover's position and orientation, enhancing the reliability of the conveyance process.

Implementation Method 1

a linear motor stator 201 and a mover 301, in which a permanent magnet 303 is mounted. The linear motor stator 201 includes a plurality of coils 202. The plurality of coils 202 generates electromagnetic forces, so that the mover 301 is moved in the X-direction

Methodology Applied
Scientific EffectElectromagnetic force: Lorentz Force

Implementation Method 2

a permanent magnet 303 is mounted on the mover 301. The plurality of coils 202 generates electromagnetic forces, so that the mover 301 is moved in the X-direction

Methodology Applied
Scientific EffectElectromagnetic interaction: Lorentz Force

Data Source

PatentUS11472638B2Conveyance apparatus, production system, and method for manufacturing article
Publication Date: 2022.10.18 CANON KK
  • US11472638B2 patent drawing
  • US11472638B2 patent drawing
  • US11472638B2 patent drawing

AI summary

A conveyance apparatus includes a mover, a stator, and a control unit. The mover moves along a first direction. The stator includes a plurality of first sensors arranged along the first direction. Each of the plurality of first sensors can detect position information about the mover. The control unit corrects the position information about the mover and controls a position and/or orientation of the mover based on at least one of a relative position between at least one of the plurality of first sensors and the mover. The relative position is obtained by (a) detection values of the plurality of first sensors and/or (b) detection times in which the plurality of first sensors each detect the position information about the mover.