Conveying Hand Pad with Elastic Segmentation for Positioning Accuracy

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Solution Overview

Problem

Conventional conveying devices experience positional shifts of conveyed objects in the plane direction during conveyance due to warpage or distortion, leading to reduced positioning accuracy.

Innovation Solution

A conveying hand with a pad unit that uses a combination of plate springs and an O-ring to maintain contact with the object, allowing for flexible absorption of shape changes in the direction of gravity while restricting movement perpendicular to gravity, utilizing negative pressure for adsorption and incorporating conductive materials to prevent electrostatic discharge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an elastic member is disposed in the lower portion of the adsorption pad to make the adsorption surface fit the shape of the conveyed object, then the adsorption effectiveness is improved, but the adsorption pad causes backlash in the plane direction perpendicular to the direction of gravity

Engineering Contradiction:
Improveadsorption effectivenessVSAvoidpositioning accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The pad is divided into multiple independent elastic elements (first elastic members) arranged in an array, each capable of independent deformation. This segmentation allows the pad to conform to the conveyed object's shape while maintaining positional stability through the coordinated action of multiple elements rather than a single flexible structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention combines two types of elastic members with different functional characteristics: first elastic members for shape adaptation and second elastic members for sealing and negative pressure generation. This merging of functions into a unified pad structure achieves both conformability and positioning accuracy simultaneously

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If the adsorption pad structure flexibly absorbs the shape change of the conveyed object in the direction of gravity, then the adsorption is improved, but the conveyed object shifts from the adsorption surface in the plane direction during delivery

Engineering Contradiction:
Improveshape adaptationVSAvoidpositioning accuracy
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

Different regions of the pad have different functional properties: the first elastic members provide local flexibility for shape adaptation, while the second elastic members provide local sealing and negative pressure. This local differentiation allows the pad to adapt to shape changes without compromising positioning accuracy in the plane direction

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces positional shifts of the conveyed object in the direction perpendicular to gravity, maintaining high positioning accuracy and preventing damage during conveyance, while also inhibiting electrostatic discharge.

Implementation Method 1

a conveying hand for conveying a conveyed object in an adsorbed state with a negative pressure

Methodology Applied
Scientific EffectNegative pressure adsorption: Suction

Implementation Method 2

a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad with respect to the base in the direction perpendicular to the direction of gravity

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 3

a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity

Methodology Applied
Scientific EffectSealing:

Data Source

PatentUS9829802B2Conveying hand and lithography apparatus
Publication Date: 2017.11.28 CANON KK
  • US9829802B2 patent drawing
  • US9829802B2 patent drawing
  • US9829802B2 patent drawing

AI summary

This conveying hand is used for conveying a conveyed object in an adsorbed state with a negative pressure, and comprises a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad on the base in the direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity.