Conveying Robot Heat Insulating Member for Thermal Interference
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Solution Overview
Problem
Conventional conveying robots in semiconductor manufacturing face issues with radiation heat interference between holding units conveying high-temperature and room-temperature substrates, leading to adverse effects on the holding units and components.
Innovation Solution
The implementation of a conveying robot system with multiple work holding units and a heat insulating member, where at least one of the holding units is equipped with a heat insulating plate or resin on its surface to minimize the impact of radiation heat during substrate conveyance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple holding units are arranged vertically to convey substrates in parallel, then productivity is improved, but radiation heat from high-temperature substrates adversely affects other holding units
Solution Approach 1:
A heat insulating member is introduced as an intermediary between the high-temperature holding unit and other holding units. This heat insulating member blocks or reduces the radiation heat from high-temperature substrates, preventing it from adversely affecting other holding units while allowing the vertical parallel arrangement to maintain high productivity
2Device complexity
If holding units are positioned close vertically to maximize space utilization, then device complexity is reduced, but heat insulation performance deteriorates
Solution Approach 1:
Heat insulating members are selectively applied to specific surfaces of holding units that are exposed to radiation heat from high-temperature substrates. This localized heat insulation approach maintains the simple vertical spatial arrangement while providing targeted thermal protection where it is most needed, without requiring complete insulation of all surfaces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces the adverse effects of radiation heat on the holding units and drive mechanisms, ensuring efficient and safe conveyance of both high-temperature and room-temperature substrates by providing protection from thermal interference.
Implementation Method 1
the radiation heat radiated from the holding unit during conveying of the high-temperature substrate or the radiation heat radiated from a heated substrate during conveying
Data Source
AI summary
A robot system according to an aspect of the embodiments includes a plurality of work holding units and a heat insulating member. The work holding units each hold a work to be conveyed on one surface and are arranged vertically one over another in some cases during conveying of the work. The heat insulating member is provided on another surface side of at least one of the work holding units.