Conveyor with Rising and Falling Surfaces for Uniform TFT Development
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Solution Overview
Problem
In the manufacturing of thin film transistors, the existing spray type developing systems result in uneven development due to the substrate being tilted at a fixed angle, leading to non-uniform pixel line widths and efficiency issues caused by the need for motor-driven tilting.
Innovation Solution
A conveyor system with obliquely configured conveying portions, including a rising and falling surface, allows for even developer distribution across the substrate by changing the substrate's angle multiple times during conveyance, eliminating the need for motor-driven tilting and enhancing production line efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the substrate is tilted at a fixed angle with respect to the horizontal plane, then the developer can flow off the substrate quickly, but the lower portion of the substrate receives more developer than the upper portion, resulting in uneven development
Solution Approach 1:
The substrate tilting angle is changed dynamically during the development process. The substrate is initially tilted at a first angle to facilitate rapid developer flow-off, then the tilting angle is adjusted to a second angle to ensure uniform developer distribution. This dynamic angle adjustment resolves the contradiction between fast developer removal and uniform development coverage.
Solution Approach 2:
The tilting angle parameter is changed during the development process. By adjusting the substrate's tilting angle from an initial value to a final value, the system optimizes both the speed of developer flow-off and the uniformity of developer distribution across the substrate surface.
2Manufacturing precision
If a motor is used to drive the substrate to be tilted at a certain angle, then the substrate can be positioned correctly, but it takes a long time, thus lowering efficiency of production line
Solution Approach 1:
The substrate performs self-tilting during the development process without requiring motor-driven positioning. The substrate is conveyed through the development solution at different speeds in different zones, which creates a natural tilting effect that positions the substrate correctly for uniform development, eliminating the need for motor-driven tilting mechanisms.
Solution Approach 2:
The motor-driven mechanical tilting system is replaced with a fluid dynamics-based approach. By controlling the conveyance speed of the substrate through the development solution, the system achieves the desired substrate orientation and developer distribution without mechanical tilting components, thereby improving production efficiency.
3Device complexity
If the substrate is conveyed in a single plane, then the conveying process is simple, but the developer distribution remains uneven
Solution Approach 1:
The substrate conveyance transitions from a static single-plane approach to a dynamic multi-zone speed control system. The substrate is conveyed at a first speed in a first zone and at a second speed in a second zone, creating dynamic tilting effects that improve developer distribution uniformity while maintaining relatively simple conveying system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system ensures uniform pixel line widths and improves production efficiency by allowing the substrate to tilt naturally, reducing processing time and minimizing the risk of apparatus downtime.
Implementation Method 1
a conveying unit (1) configured to convey a substrate (10)
Data Source
AI summary
A conveyor, a developing system and a developing method are provided. The conveyor includes a conveying unit configured to convey a substrate and having a plurality of conveying portions. The plurality of conveying portions includes a first tilt conveying portion and a second tilt conveying portion. One of a conveying surface of the first tilt conveying portion and a conveying surface of the second tilt conveying portion is a rising surface configured to raise the substrate gradually, and the other one of the conveying surfaces is a falling surface configured to bring down the substrate gradually.