Cooled Coating Window Assembly for Clean Vacuum Deposition
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Solution Overview
Problem
Vacuum deposition systems face challenges with unproductive coating contamination of the vacuum chamber, limited substrate cooling leading to temperature-sensitive film degradation, and complex cleaning processes that hinder productivity.
Innovation Solution
A device comprising a movable main body with deposition sources, coating windows, and cooling devices, along with shields to manage backcoating, allowing easy window replacement and maintaining low temperatures for high deposition rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the coating window is connected to the chill roll to ensure sufficient cooling, then the coating window temperature is reduced, but the assembly becomes difficult and costly, and the coating window can only be removed with great effort
Solution Approach 1:
The device is divided into a movable main body containing the deposition source and coating window, which can be independently removed from the vacuum chamber. This segmentation allows the coating window to be easily accessed and replaced without moving the entire vacuum chamber or chill roll assembly, resolving the contradiction between cooling efficiency and assembly complexity.
2Manufacturing precision
If the coating window edge is heavily coated to achieve high coating homogeneity, then coating quality improves, but the coating window becomes hot, limiting the maximum coating rate
Solution Approach 1:
A shield is introduced to extract and intercept the coating material before it reaches the coating window. The shield captures the backcoating (material that would otherwise hit the window), redirecting it away from the window while maintaining the necessary coating edges for homogeneity. This reduces the heat load on the coating window, allowing higher coating rates without compromising coating quality.
3Reliability
If regular cleaning of the coating window is performed to remove contamination, then system reliability improves, but productivity decreases due to time loss
Solution Approach 1:
The coating window is designed as a replaceable component on the movable main body. Instead of performing regular cleaning operations that halt production, the entire movable main body with the coating window can be quickly removed and replaced with a fresh one. This disposable approach eliminates cleaning time losses while maintaining system reliability, as each new coating window starts with a clean surface.
4Ease of operation
If the movable main body with integrated cooling device is used, then window replacement becomes easy and cooling efficiency improves, but the device complexity increases
Solution Approach 1:
The cooling device is merged with the movable main body as an integrated unit. The cooling channels are built into the structure of the movable main body itself, combining the support structure and cooling function in one component. This integration simplifies operation by allowing the entire cooled assembly to be moved as a single unit, while the complexity is managed through modular design that can be manufactured and maintained as a standardized component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances productivity and product quality by reducing backcoating on windows, minimizing substrate heating, and simplifying cleaning processes.
Implementation Method 1
at least one cooling device connected to the at least one coating window and mounted on the movable main body
Implementation Method 2
Systems for coating films onto subtsrates in a vacuum often use Physical Vapor Deposition (PVD) or Chemical Vapor Deposition (CVD) processes
Data Source
AI summary
A device for vacuum deposition systems, comprising: a movable main body, at least one deposition source mounted on the movable main body, at least one coating window associated with the at least one deposition source and mounted on the movable main body, and at least one cooling device connected to the at least one coating window and mounted on the movable main body.