System and method for operating the same
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Solution Overview
Problem
Current semiconductor manufacturing processes lack an effective method for precisely and sufficiently removing residues, which is critical for maintaining the quality and integrity of semiconductor devices.
Innovation Solution
A system comprising a cleaning device with a tank, pump, heater, filter, and oscillator, and a concentration measuring device with a cooler, pump, and processor, which uses a liquid to remove residues and measures concentration efficiently, with the cooler capable of cooling the liquid to a precise temperature within minutes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional cleaning methods are used to remove semiconductor residues, then the cleaning process is simple, but the residues cannot be sufficiently or precisely removed
Solution Approach 1:
The cleaning system is divided into multiple functional modules: a cleaning device with tank, pump, heater, filter, and oscillator; and a separate concentration measuring device with cooler, pump, and processor. This segmentation allows each module to perform its specific function optimally, achieving precise residue removal while maintaining manageable system complexity through modular design.
Solution Approach 2:
The concentration measuring device continuously monitors the concentration of cleaning liquid and provides feedback to the cleaning device. The processor analyzes the concentration data and adjusts the cleaning process parameters, creating a closed-loop control system that ensures precise and sufficient residue removal while optimizing cleaning efficiency.
2Measurement precision
If the cleaning liquid concentration is not monitored, then the system operation is simple, but the concentration accuracy cannot be ensured
Solution Approach 1:
A cooler is introduced as an intermediary component between the cleaning device and the concentration meter. The cooler cools the cleaning liquid to a predetermined temperature before it reaches the concentration meter, ensuring that temperature variations do not affect the measurement accuracy. This intermediary component enables precise concentration measurement while keeping the measurement system relatively simple.
Solution Approach 2:
The system controls the temperature of the cleaning liquid as a critical parameter before measurement. By cooling the liquid to a predetermined temperature, the system ensures that physical and chemical properties of the liquid are stable, which directly improves the accuracy of concentration measurements without requiring complex measurement equipment.
3Measurement precision
If the cleaning liquid is not cooled before measurement, then the system operation is simple, but the concentration measurement is inaccurate
Solution Approach 1:
The cleaning liquid is cooled to a predetermined temperature before it enters the concentration meter for measurement. This preliminary cooling action ensures that the liquid is in an optimal state for accurate measurement, preventing temperature-related measurement errors and improving overall measurement precision and efficiency.
4Reliability
If high concentration cleaning liquid is used, then residue removal effectiveness is improved, but the risk of damaging semiconductor devices increases
Solution Approach 1:
The concentration measuring device provides real-time feedback on the cleaning liquid concentration to the cleaning device. The processor analyzes this data and automatically adjusts the cleaning liquid concentration and other parameters to optimize residue removal while preventing device damage. This closed-loop control ensures the cleaning process remains within safe and effective parameters throughout operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables efficient removal of semiconductor residues and precise concentration measurement, improving the semiconductor manufacturing process by ensuring residues are effectively removed without damaging the devices and providing accurate concentration data.
Implementation Method 1
the cooler capable of cooling the liquid to a precise temperature within minutes
Implementation Method 2
a cleaning device with a tank, pump, heater, filter, and oscillator
Implementation Method 3
a cleaning device with a tank, pump, heater, filter, and oscillator
Data Source
AI summary
A system includes a cooler, a concentration meter, a first pump and a second pump. The cooler is configured to cool first liquid by second liquid in the cooler. The concentration meter is configured to measure a concentration of the first liquid. The first pump is configured to move the first liquid according to the concentration. The second pump is coupled to the cooler, disposed with the first pump in a parallel manner, and configured to move the second liquid.