Cooling device, substrate treatment device, cooling method, and substrate treatment method
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Solution Overview
Problem
Existing cooling devices for substrate treatment face issues with wasteful consumption of low-temperature gas and frequent failures due to inconsistent gas supply, particularly when treatments requiring cooling and those not requiring cooling coexist, leading to inefficient gas usage and device malfunctions.
Innovation Solution
A cooling device with a refrigerant circulation system that includes a compressor, condenser, cooler, and heat exchanger, controlled by thermometers and controllers to adjust refrigerant temperature based on detected temperatures, switching between control methods to prevent refrigerant coagulation and maintain efficient gas supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If the supply of low-temperature gas is stopped or reduced during treatment not requiring cooling or between treatments, then gas consumption is reduced, but cooling device failure occurs frequently
Solution Approach 1:
The patent implements dynamic control of the cooling device by switching between two control modes: first control during cooling treatments and second control during non-cooling treatments or idle periods. This dynamic adaptation allows the system to optimize gas supply based on actual treatment requirements, reducing wasteful consumption while maintaining device reliability through appropriate control adjustments.
Solution Approach 2:
The patent changes the control parameters of the cooling device based on treatment type. During non-cooling treatments or between treatments, the system switches to second control which adjusts temperature and gas supply parameters differently than during active cooling treatments. This parameter adaptation prevents device failure while reducing gas consumption during periods when cooling is not required.
2Reliability
If low-temperature gas is supplied continuously at the same amount during treatment and between treatments, then cooling performance is maintained, but wasteful gas consumption increases
Solution Approach 1:
The patent applies partial action by providing cooling only when necessary. During treatments not requiring cooling or between treatments, the system reduces or stops low-temperature gas supply instead of maintaining full cooling capacity. This partial action eliminates wasteful gas consumption while maintaining cooling performance during actual treatment periods through the first control mode.
Solution Approach 2:
The patent implements periodic switching between first control (during cooling treatments) and second control (during non-cooling treatments or idle periods). This periodic adaptation of control modes allows the system to maintain cooling performance when needed while reducing gas consumption during periods when cooling is not required, creating an efficient operational cycle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system optimizes gas usage by controlling refrigerant temperature based on detected values, reducing wasteful consumption and preventing device failures by preventing refrigerant coagulation, thus ensuring reliable and efficient cooling operations.
Implementation Method 1
a heat exchanger provided in the flow path... a gas cooling part supplying a gas to the heat exchanger, and configured to cool the gas by exchanging heat with the refrigerant
Implementation Method 2
a compressor provided in the flow path between the condenser and the heat exchanger
Implementation Method 3
a condenser provided in the flow path... a cooler cooling the refrigerant flowing from the condenser into the heat exchanger
Data Source
AI summary
According to one embodiment, a cooling device includes a flow path configured to flow a refrigerant, a condenser provided in the flow path, a heat exchanger provided in the flow path, a compressor provided in the flow path between the condenser and the heat exchanger, a cooler cooling the refrigerant flowing from the condenser into the heat exchanger, a gas cooling part supplying a gas to the heat exchanger, and configured to cool the gas by exchanging heat with the refrigerant, a first thermometer configured to detect a temperature of the cooled gas, a second thermometer configured to detect a temperature of the refrigerant flowing into the heat exchanger, and a first controller configured to control the temperature of the cooled refrigerant flowing into the heat exchanger by the cooler. The first controller controls the temperature of the cooled refrigerant by switching a first control and a second control.