Process Chamber Cooling Plate Bypass Valve for Coolant Temperature Control
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Solution Overview
Problem
Conventional temperature control systems in plasma processing chambers are inadequate in controlling the temperature of the coolant before it returns to the heat exchanger, leading to potential damage and increased cooling times.
Innovation Solution
The implementation of a proportional bypass valve system connected to a cooling plate within the processing chamber, which includes coolant channels and a temperature sensor, allows for real-time adjustment of coolant flow rates to maintain optimal temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional temperature control systems provide coolant to chamber components, then components can be cooled, but the temperature of the coolant is not controlled before returning to the heat exchanger, leading to damage and increased cooling time
Solution Approach 1:
The bypass valve provides preliminary cooling action by diverting coolant flow before it returns to the heat exchanger. This preliminary action prevents the heat exchanger from being exposed to excessively hot coolant, thereby protecting it from damage while maintaining effective temperature control of the chamber components.
Solution Approach 2:
The system dynamically adjusts coolant flow distribution between the chamber components and the bypass line based on real-time temperature conditions. The bypass valve can modulate its opening to optimize the split of coolant flow, allowing adaptive response to changing thermal conditions and preventing heat exchanger damage while maintaining component cooling effectiveness.
2Productivity
If higher power plasmas are used to increase processing speed, then productivity increases, but more heat is generated requiring more effective cooling
Solution Approach 1:
The coolant flow is segmented into two separate paths: one path cools the chamber components (chuck assembly or plasma source) and the other path bypasses directly to the heat exchanger. This segmentation allows independent optimization of each cooling function, enabling effective heat removal from high-power plasma operations while maintaining component temperature control.
Solution Approach 2:
The bypass valve acts as an intermediary element that mediates between the hot coolant returning from components and the heat exchanger. By providing an alternative cooling path, it enables the system to handle the increased heat loads from higher power plasmas without compromising component cooling or heat exchanger safety.
3Manufacturing precision
If precision temperature control is required for smaller microelectronic features, then manufacturing precision improves, but the temperature control system must operate over a wider range with higher accuracy
Solution Approach 1:
The temperature control system uses feedback from temperature sensors to monitor the thermal state of chamber components and adjusts the bypass valve position accordingly. This feedback mechanism enables precise temperature control across a wide operating range, supporting the manufacturing precision required for smaller microelectronic features while managing system complexity through automated control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces process time, minimizes the risk of arcing, increases throughput, and provides improved thermal control by precisely managing coolant temperatures and flow rates.
Implementation Method 1
a plasma source disposed within the processing chamber and configured to generate the plasma
Implementation Method 2
a temperature of components disposed within the processing chamber (e.g., a substrate, a substrate support, a source, etc.) is an important parameter that controls the effectiveness or speed of the plasma process
Implementation Method 3
cooled by a coolant flow through a heat exchanger
Implementation Method 4
a respective cooling plate, the respective cooling plate including coolant channels
Data Source
AI summary
Methods and apparatus of controlling a temperature of components in a process chamber that is heated by a plasma or a heater and cooled by a coolant flow through a heat exchanger. An apparatus, for example, can include a chuck assembly and/or a plasma source including a respective cooling plate; a proportional bypass valve connected between the respective cooling plate and a heat exchanger; a temperature sensor configured to measure a temperature of the coolant through the outlet channel of the respective cooling plate; and a controller that receives a measured temperature from the temperature sensor measuring, and in response to receiving the measured temperature controls a rate of flow of the coolant through the first coolant output line and the second coolant output line of the proportional bypass valve.