Cooling Plate Flatness Adjustment via Tendon Tension
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Solution Overview
Problem
In thin film deposition processes, cooling plates used to prevent substrate deformation often sag due to gravity, leading to non-uniform heat dissipation and irregular film deposition patterns, which can affect the performance of electronic products.
Innovation Solution
A plate flatness adjusting device with tendons penetrating the cooling plate and a tensile strength adjuster system that applies variable forces to the tendons to compensate for sagging, ensuring even flatness and heat distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a cooling plate is provided above the substrate to dissipate heat, then heat dissipation is improved, but the cooling plate sags due to gravity causing non-uniform heat dissipation
Solution Approach 1:
The patent applies counterbalancing forces through tensioning members (tendons) that exert upward force on the cooling plate to compensate for the downward gravitational force, preventing sagging and maintaining uniform flatness across the plate surface during operation
Solution Approach 2:
The patent changes the physical state of the tensioning members from relaxed to taut by applying tensile strength, thereby transforming the cooling plate from a sagging state to a flat, uniformly supported state that ensures even heat dissipation
2Stability of the object's composition
If the substrate is pressed toward the mask to reduce thermal deformation, then thermal deformation is reduced, but the cooling plate may not maintain flatness due to gravity
Solution Approach 1:
The tensioning members provide counterbalancing upward force on the cooling plate to offset gravitational sagging, allowing the substrate to be pressed toward the mask for thermal deformation prevention while the cooling plate maintains its flat geometry through the counteracting tensile forces
3Shape
If tendons are used to maintain cooling plate flatness, then cooling plate flatness is improved, but the device complexity increases
Solution Approach 1:
The patent employs flexible tensioning members (tendons) that can be threaded through the cooling plate structure, providing a relatively simple and adaptable mechanism for maintaining plate flatness compared to rigid support systems, while allowing for easy adjustment of tensile strength
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively reduces sagging and maintains the flatness of cooling plates, enhancing the uniformity of heat dissipation and improving the quality of thin film deposition processes.
Implementation Method 1
at least one tendon penetrating a through-hole of a plate and having lateral ends protruding outside of the plate
Implementation Method 2
the center portion of the cooling plate may sag to a greater extent than edge portions due to gravity
Implementation Method 3
a tensile strength adjuster coupled to the accommodation portion to adjust a tensile strength of the at least one tendon, the adjusted tensile strength to adjust a degree of flatness of the plate
Data Source
AI summary
A plate flatness adjusting device includes at least one tendon, an accommodation portion, and a tensile strength adjuster. The at least one tendon penetrates a through-hole of a plate and has lateral ends protruding outside of the plate. The accommodation portion accommodates the lateral ends of the at least one tendon. The tensile strength adjuster is coupled to the accommodation portion to adjust a tensile strength of the at least one tendon. The adjusted tensile strength adjusts a degree of flatness of the plate.