Cooling water circulation system-integrated by-product collection apparatus
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Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in efficiently collecting by-products generated during the manufacturing process, particularly due to the solidification of exhaust gases into powder when exposed to low ambient temperatures, leading to vacuum pump failures and contamination, and require infrastructure for cooling water supply for effective by-product collection.
Innovation Solution
A cooling water circulation system-integrated by-product collection apparatus that uses a by-product collection module connected to a pipeline with a cooling water supply module, featuring a thermoelectric heat exchange member and a compact configuration, allowing for effective by-product collection at low temperatures without the need for a pre-established cooling water infrastructure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a trapping pipe is used to collect by-products, then by-products can be collected, but the trapping pipe space is very narrow and requires frequent replacement
Solution Approach 1:
The patent transitions from a one-dimensional linear trapping pipe to a three-dimensional housing structure with internal cooling lines, creating multiple spatial dimensions for by-product accumulation and cooling water circulation, thereby significantly increasing the effective collection volume without increasing the device footprint
2Productivity
If a cooling line is installed at the inner wall surface to rapidly solidify by-product gas, then by-product collection efficiency improves, but the device requires infrastructure for supplying cooling water which limits installation flexibility
Solution Approach 1:
The cooling water circulation system is designed as a self-contained unit with an integrated water tank and pump, allowing the device to generate and circulate its own cooling water without requiring external infrastructure, thereby maintaining rapid solidification capability while achieving installation flexibility
3Productivity
If cooling water circulation is used to rapidly solidify by-products, then by-product collection efficiency improves, but the device configuration becomes more complex
Solution Approach 1:
The patent combines the cooling water tank, circulation pump, cooling lines, and by-product collection housing into a single integrated device, merging multiple functions (cooling, collection, circulation) into one unified structure, thereby reducing overall system complexity despite the advanced cooling capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently collects by-products by rapidly solidifying and depositing gases using cooling water circulation, preventing vacuum pump failures and allowing for flexible installation without the need for existing cooling water infrastructure, while maintaining a compact and space-efficient design.
Implementation Method 1
a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe
Implementation Method 2
the exhaust gas discharged from the process chamber is solidified into powder when the exhaust gas comes into contact with the atmosphere or the ambient temperature is low
Implementation Method 3
a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe
Data Source
AI summary
Disclosed is a by-product collection apparatus which collects a by-product generated during a manufacturing process of manufacturing a semiconductor or a semiconductor-like product. The apparatus includes: a by-product collection module connected to a pipeline in series and configured to collect a by-product from a by-product gas, wherein the by-product gas flows in the pipeline having an inlet pipe and an outlet pipe provided at upper and lower portions of a first casing; and a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe.