Cooling Water Temperature Control via Segmented Tanks and Variable Pump Speed
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Solution Overview
Problem
In semiconductor production, especially in EUV light generation systems, precise temperature control of cooling water is challenging due to the need for fine-tuned cooling performance and the risk of corrosion in advanced microfabrication processes, where existing systems often require large tanks and are inefficient in temperature stabilization.
Innovation Solution
A cooling water temperature control device comprising a heat exchanger, a tank, circulation pipes, a pump, and a controller that adjusts the flow rate and temperature of secondary cooling water using primary cooling water, with optional inert gas introduction to prevent corrosion, allowing for precise temperature control and reduced system size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a large tank is used to store cooling water, then temperature stabilization is improved, but system size and complexity increase
Solution Approach 1:
The cooling water system is divided into multiple circulation loops with individual temperature control. Instead of using one large tank, the system employs multiple smaller tanks (first cooling water tank, second cooling water tank) that serve specific functions, reducing overall system volume while maintaining temperature stability through distributed control
Solution Approach 2:
The system uses variable speed pumps and controllable flow rate mechanisms to dynamically adjust cooling water circulation. The pump speed and flow rate are automatically controlled based on temperature sensor feedback, enabling precise temperature stabilization without requiring large thermal mass tanks
2Productivity
If cooling water flow rate is increased, then cooling efficiency is improved, but temperature control precision deteriorates
Solution Approach 1:
The system employs variable speed pumps that can dynamically adjust flow rate based on real-time temperature requirements. The pump speed is controlled within a range (e.g., 0-100% of maximum) to optimize both cooling efficiency and temperature control precision for different operating conditions
Solution Approach 2:
Temperature sensors continuously monitor cooling water temperature and provide feedback to the control system. Based on this feedback, the controller automatically adjusts pump speed and flow rate to maintain precise temperature control while maximizing cooling efficiency when needed
3Device complexity
If conventional cooling systems are used, then system simplicity is maintained, but corrosion risk increases in advanced microfabrication processes
Solution Approach 1:
The system introduces inert gas (such as nitrogen) into the cooling water circulation system to create an inert environment that prevents oxidation and corrosion of metal components. This is achieved through gas injection points in the cooling water tanks and circulation loops, protecting the system from corrosive effects while maintaining operational simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves efficient temperature stabilization of secondary cooling water and subsequently the temperature-control targets, reducing the time to reach desired temperatures and preventing corrosion, while minimizing system size and operational costs.
Implementation Method 1
a heat exchanger for carrying out heat exchange between primary cooling water and secondary cooling water
Implementation Method 2
a pump for circulating the secondary cooling water stored in the tank through the heat exchanger, the temperature-control target, and the tank
Data Source
AI summary
A device for controlling the temperature of cooling water includes a three-way valve having a first inlet, a second inlet, and an outlet; a first feed pipe; a second feed pipe; and a return pipe for connecting between an outlet of the temperature-control target and an inlet of the cooling water supply unit. The device also includes a return-side bypass pipe for connecting between the return pipe and the second inlet of the three-way valve; a pump provided on the second feed pipe for circulating the cooling water between the three-way valve and the temperature-control target; and a temperature measuring unit for measuring a temperature of the cooling water flowing in the second feed pipe. In addition, the device includes a controller for controlling the three-way valve and the pump in accordance with a detection result of the temperature measuring unit.