Coordinate Correction Table Selection for Semiconductor Defect Review
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Solution Overview
Problem
Existing semiconductor defect review systems face challenges in accurately positioning a sample stage due to deviations in coordinate systems, especially when multiple higher-level checking apparatuses are involved or when deviation tendencies change over time, leading to suboptimal defect detection performance.
Innovation Solution
The system maintains multiple coordinate correction tables, evaluates their effectiveness, and dynamically selects the optimal table based on the combination of checking apparatus and calculation conditions to correct deviations, ensuring accurate positioning and improved defect detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single coordinate correction table is used for all checking apparatuses and conditions, then the device complexity is reduced, but the measurement precision deteriorates when multiple checking apparatuses or changing conditions are involved
Solution Approach 1:
The patent segments the single coordinate correction table into multiple separate correction tables, each corresponding to a specific checking apparatus or condition. This allows each table to be optimized for its particular apparatus, improving measurement precision without significantly increasing overall system complexity through modular organization.
Solution Approach 2:
The patent implements dynamic selection of coordinate correction tables based on the checking apparatus ID and calculation conditions. The system automatically switches between different correction tables depending on which apparatus is performing the check, allowing the system to adapt to changing conditions and maintain high precision across multiple apparatuses.
2Measurement precision
If the magnification for low magnification image is set too high, then the defect detection capability is improved, but the defect may be out of the field of view when position deviation is substantial
Solution Approach 1:
The patent applies coordinate correction before acquiring the low magnification image, using the appropriate correction table selected based on the checking apparatus ID and calculation conditions. This preliminary correction ensures that the defect position is accurately predicted, allowing the system to set an optimal magnification that maintains the defect within the field of view while maximizing detection capability.
Solution Approach 2:
The system uses feedback from the checking apparatus coordinates and calculated deviation amounts to dynamically adjust the magnification setting. By continuously monitoring the position deviation and selecting the appropriate correction table, the system can optimize magnification in real-time to ensure defects remain visible while improving detection precision.
3Measurement precision
If user experience is used to set the magnification parameter, then the defect detection performance can be optimized, but the ease of operation deteriorates due to dependence on user skill
Solution Approach 1:
The patent implements automatic magnification setting that performs the function previously requiring user expertise. The system automatically selects the appropriate coordinate correction table based on the checking apparatus ID and calculation conditions, then calculates and sets the optimal magnification parameter without user intervention, making the system as easy to operate as simple button pressing while maintaining high detection performance.
Solution Approach 2:
The system automatically changes the magnification parameter based on the selected coordinate correction table and calculated deviation amount. Instead of requiring users to manually adjust magnification, the system dynamically modifies this parameter based on the specific apparatus and conditions, eliminating the need for user skill while optimizing detection performance.
Data Source
AI summary
The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.