Coplanar Conductor Measuring Tip for High-Frequency Impedance Control
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Solution Overview
Problem
Existing contact arrangements for high-frequency measurements on semiconductor wafers face challenges in matching impedance with the tested circuits, leading to undesirable reflections and limitations in signal transmission, particularly due to costly manufacturing and lack of controlled impedance.
Innovation Solution
A contact arrangement featuring a coplanar conductor structure with at least two conductors carried by a dielectric, where the conductors are disposed freely and resiliently relative to the dielectric, and an arrangement for transmitting electric signals is connected to the conductors to ensure constant wave resistance and interference-free signal transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional contact arrangement is used for high-frequency measurement, then the structure is simple, but the impedance matching is poor causing reflections
Solution Approach 1:
The patent changes the geometric parameters of the coplanar conductor structure, specifically the slot width between conductors and the conductor dimensions, to achieve controlled impedance matching. The slot width is specifically designed to maintain constant wave resistance along the conductor length, transforming the conventional simple contact structure into one with optimized electromagnetic properties.
Solution Approach 2:
The patent employs a composite structure combining conductors (copper or copper alloy) with a dielectric material. This composite arrangement allows the dielectric to provide mechanical support and insulation while the conductor geometry is optimized for impedance control, creating a unified structure that achieves both mechanical stability and electromagnetic performance.
2Reliability
If the conductors are rigidly fixed to the dielectric, then the manufacturing is easier, but the signal transmission has interference and loss
Solution Approach 1:
The patent transitions from a rigid conductor fixation to a resilient, flexible connection where conductors can move independently relative to the dielectric. This dynamic capability allows the conductors to maintain optimal positioning and spacing for impedance control while being resiliently supported by the dielectric, improving signal transmission by reducing interference and loss.
3Manufacturing precision
If a coplanar conductor structure with resilient conductors is used, then the impedance control is improved, but the manufacturing precision requirements increase
Solution Approach 1:
The patent applies local quality optimization by specifically designing the slot region between conductors with controlled dimensions and properties. The slot width is precisely defined to provide the necessary impedance control, while other regions of the dielectric maintain standard support functions. This localized approach achieves high impedance control without requiring the entire structure to meet stringent precision requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient, interference-free signal transmission with minimal loss, supporting a wide range of applications and maintaining consistent impedance across the coplanar conductor structure, thus enhancing the contact arrangement's performance in high-frequency measurements.
Implementation Method 1
an arrangement for transmitting electric signals, which is connected electrically to at least one of the at least two conductors of the coplanar conductor structure such that the arrangement transmits signals from the at least one of the at least two conductors
Implementation Method 2
a coplanar conductor structure with at least two conductors carried by a dielectric
Data Source
AI summary
The invention relates to a contact arrangement for a measuring probe or a measuring head for measuring high frequency, especially on a semiconductor wafer. The arrangement comprises a contact end for electrically contacting planar structures. A coplanar conductor structure having at lease two conductors carried by a dielectric is provided at the contact end. Between the dielectric and the contact end, the measuring tip is configured in such a manner that the conductors of the coplanar conductor structure are disposed in mid-air and in a resilient manner in relation to the dielectric retaining them. The invention is characterized in that the dielectric is provided with at least one arrangement for transmitting electrical signals, the arrangement being electrically connected to at least one conductor of the conductor structure in such a manner that the arrangement transmits signals from the at least one conductor that is electrically connected to the arrangement.