Coplanar Diaphragm Pressure Sensor Design

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Solution Overview

Problem

Existing pressure sensors with axially opposed diaphragms require extensive passageways and are difficult to manufacture due to the complex arrangement of diaphragms and passageways.

Innovation Solution

A sensor design featuring coplanar diaphragms within the housing, with a die attached to the housing parallel to the diaphragms, allowing for differential pressure measurement with reduced complexity in passageway design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If two diaphragms are arranged axially opposed to measure differential pressure, then differential pressure measurement capability is achieved, but extensive passageways are required in the housing and manufacturing becomes difficult and time consuming

Engineering Contradiction:
Improvedifferential pressure measurement capabilityVSAvoidpassageway complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent transitions from a conventional axial arrangement (one dimension) to a coplanar arrangement (another dimension). The diaphragms are positioned side-by-side in the same plane rather than one above the other, fundamentally changing the spatial dimension of the configuration. This dimensional shift eliminates the need for complex vertical passageways while preserving differential pressure measurement functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs an asymmetric layout where the first and second diaphragms are positioned at different locations within the same plane, with the first diaphragm associated with a first pressure input and the second diaphragm with a second pressure input. This asymmetric coplanar arrangement optimizes the distribution of pressure inputs and simplifies the overall housing structure compared to symmetric axial arrangements.

Inventive Principle:
Principle #4Asymmetry

2Adaptability or versatility

If two diaphragms are arranged axially opposed to measure differential pressure, then differential pressure measurement capability is achieved, but manufacturing becomes difficult and time consuming

Engineering Contradiction:
Improvedifferential pressure measurement capabilityVSAvoidmanufacturing ease
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

By repositioning the diaphragms from an axial vertical stack to a coplanar horizontal arrangement, the patent creates a manufacturing-friendly layout. The coplanar configuration allows for simpler assembly processes, easier positioning during manufacturing, and reduced complexity in aligning multiple components, directly improving ease of manufacture while maintaining differential pressure measurement capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If extensive passageways are formed in the housing to transmit pressures to axially opposed diaphragms, then differential pressure measurement is enabled, but the housing complexity and manufacturing time increase

Engineering Contradiction:
Improvedifferential pressure measurementVSAvoidmanufacturing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The coplanar arrangement of diaphragms in the same plane fundamentally reduces the passageway requirements compared to axial arrangements. Pressure transmission paths become shorter and simpler in the coplanar configuration, eliminating the need for extensive vertical passageways and significantly reducing manufacturing time while preserving measurement precision.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design simplifies the manufacturing process and reduces the complexity of passageways within the housing, while maintaining the capability to measure differential pressures effectively.

Implementation Method 1

When an external pressure is applied to the diaphragm, the diaphragm deflects, transferring the external pressure to the oil surrounding the die

Methodology Applied
Scientific EffectPressure transmission: Pascal's Law

Implementation Method 2

The die deflects in accordance with the external pressure to generate an electrical signal representative of the external pressure

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS12313483B2Sensor having a plurality of diaphragms
Publication Date: 2025.05.27 TE CONNECTIVITY SOLUTIONS GMBH
  • US12313483B2 patent drawing
  • US12313483B2 patent drawing
  • US12313483B2 patent drawing

AI summary

A sensor includes a housing having a body, a plurality of ports, and a plurality of cavities. The ports include a first port and a second port, and the cavities include a first cavity disposed in the first port and a second cavity disposed in the second port. The sensor includes a first diaphragm disposed in the first port and enclosing the first cavity and a second diaphragm disposed in the second port and enclosing the second cavity. The first diaphragm and the second diaphragm are coplanar with one another in a first plane. The sensor includes a die disposed in the first cavity and having a membrane that is deflectable according to a differential pressure between a first pressure in the first cavity and a second pressure in the second cavity. The die is attached to the housing along a second plane parallel to the first plane.