Coplanar Waveguide With Alternating Widths for Compact IC Design
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Solution Overview
Problem
Conventional on-chip passive components occupy a large area and incur significant costs in communications systems, with existing slow-wave coplanar waveguide structures not adequately addressing the need for reduced size and integration for microwave and millimeter-wave integrated circuits.
Innovation Solution
A compact on-chip slow-wave coplanar waveguide structure with alternating wide and narrow portions and adjustable spacing between signal and ground layers, allowing for tuning of capacitance and inductance, and the incorporation of cross-under and cross-over metal strips to enhance the slow-wave effect.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If conventional on-chip passive components are used, then circuit functionality is achieved, but large board area is occupied and cost increases
Solution Approach 1:
The coplanar waveguide structure is segmented into alternating wide and narrow portions along its length. This segmentation creates distributed capacitance and inductance variations that enable slow-wave propagation, effectively reducing the physical length required for given electrical characteristics while maintaining circuit functionality
Solution Approach 2:
Different sections of the waveguide are given different local qualities through varying width. The wide portions provide higher capacitance while narrow portions provide lower capacitance, creating the necessary distributed LC structure for slow-wave effects without requiring uniform geometry throughout
2Length of moving object
If slow-wave coplanar waveguide structures are implemented, then reduced component size is achieved, but manufacturing precision requirements increase
Solution Approach 1:
The waveguide structure utilizes controlled changes in the geometric parameter of width along its length. By systematically varying the width between wide and narrow portions according to design specifications, the structure achieves the desired slow-wave characteristics while the variations can be controlled through standard fabrication processes
3Speed
If alternating wide and narrow portions are used in the signal layer, then slow-wave effect is enhanced, but structure complexity increases
Solution Approach 1:
The waveguide structure employs periodic alternation between wide and narrow portions along its length. This periodic geometric modulation creates distributed capacitance and inductance that produce the slow-wave propagation effect, reducing phase velocity to a fraction of the speed of light while maintaining a regular, manufacturable pattern
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The structure achieves improved slow-wave effects with increased capacitance and inductance per unit length, reducing the physical dimensions of passive components and board area usage while maintaining low losses, compatible with CMOS fabrication technology.
Implementation Method 1
tuning at least one of a capacitance and inductance of the coplanar waveguide structure by adjusting a spacing between at least one of a wide portion and a narrow portion of a signal line and a ground
Implementation Method 2
tuning at least one of a capacitance and inductance of the coplanar waveguide structure by adjusting a spacing between at least one of a wide portion and a narrow portion of a signal line and a ground
Data Source
AI summary
On-chip high performance slow-wave coplanar waveguide structures, method of manufacture and design structures for integrated circuits are provided herein. The structure includes at least one ground and a signal layer provided in a same plane as the at least one ground. The signal layer has at least one alternating wide portion and narrow portion. The wide portion extends toward the at least one ground.