Coplanarity Assist Unit for Semiconductor Tester Head Planarity
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Solution Overview
Problem
Current semiconductor testing apparatuses lack a digital mechanism to accurately detect and adjust docking planarity between the tester head and the prober, leading to potential issues such as burnt needles or damaged tips due to varying planarity during re-docking, which cannot be visually inspected and require manual checking.
Innovation Solution
A coplanarity assist unit with distance sensors and a coplanarity assistant module that uses laser, ultrasonic, infrared, or other sensors to digitally detect and adjust the planarity between the tester head and the prober, providing real-time monitoring and corrective actions to ensure coplanarity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual visual inspection is used to check docking planarity, then device complexity is reduced, but measurement precision and reliability deteriorate due to inability to accurately detect planarity variations
Solution Approach 1:
The patent replaces manual visual inspection with optical sensors (laser, ultrasonic, or infrared) to automatically detect docking planarity. This substitution of mechanical/manual measurement with optical sensing achieves precise digital detection of planarity variations without requiring complex manual intervention, resolving the contradiction between measurement precision and device complexity.
2Reliability
If no digital detection mechanism is used, then device complexity is low, but reliability deteriorates due to burnt needles or damaged tips from varying planarity
Solution Approach 1:
The coplanarity assist unit performs preliminary detection and adjustment of docking planarity before semiconductor testing begins. By measuring planarity with distance sensors and providing real-time feedback for adjustment, the system prevents burnt needles or damaged tips that would occur during testing, thereby improving reliability while adding controlled complexity only when needed.
Solution Approach 2:
The patent implements a feedback mechanism where distance sensors continuously measure the distance between the tester head and prober, and the coplanarity assistant module uses this data to determine and guide planarity adjustments. This closed-loop feedback system ensures reliable docking by automatically correcting planarity deviations, resolving the contradiction between reliability and device complexity.
3Productivity
If manual checking of planarity is performed, then ease of operation is maintained, but productivity deteriorates due to time-consuming adjustments
Solution Approach 1:
The coplanarity assist unit enables self-service automatic detection and guidance of docking planarity adjustments. The distance sensors automatically measure planarity, and the coplanarity assistant module provides real-time feedback without requiring manual intervention, thereby improving productivity while maintaining ease of operation through automated processes.
Data Source
AI summary
A coplanarity assist unit includes a plurality of distance sensors mounted on at least one of a lower body or a upper body at a plurality of locations, respectively, and configured to detect a distance between the lower body and the upper body at the plurality of locations, and a coplanarity assistant configured to determine whether coplanarity exists between the lower body and the upper body and assist with setting coplanarity between the lower body and the upper body based on an output of the plurality of distance sensors.