Block Copolymer Annealing Control Using Real-Time Swelling Feedback
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The kinetics of block copolymer self-assembly for pattern formation in nanoscale device fabrication are sensitive to swelling levels, requiring precise control of thermodynamic conditions to achieve fast and efficient pattern formation.
Innovation Solution
An apparatus and method that measures swelling during solvent vapour annealing and uses temperature control means, including thermoelectric cooling modules, to optimize thermodynamic conditions for pattern formation, with optical measurement means to monitor thickness and control circuitry to adjust temperature based on swelling data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If solvent vapour annealing is used to accelerate pattern formation, then productivity is improved, but swelling control becomes difficult leading to processing issues
Solution Approach 1:
The patent implements real-time feedback control by measuring swelling level changes during solvent vapour annealing and using this information to dynamically adjust processing parameters. The system continuously monitors the block copolymer swelling and adjusts temperature or solvent exposure accordingly, resolving the contradiction between accelerated pattern formation and precise swelling control.
Solution Approach 2:
The patent dynamically changes processing parameters (temperature, solvent vapour concentration, exposure time) based on real-time swelling measurements. By adjusting these parameters in response to measured swelling levels, the system maintains optimal conditions for both fast pattern formation and precise swelling control.
2Productivity
If temperature is increased to speed up self-assembly, then productivity is improved, but swelling control becomes less precise
Solution Approach 1:
The patent transitions from static temperature control to dynamic temperature control that adapts in real-time based on measured swelling levels. The temperature is continuously adjusted during the self-assembly process rather than maintained at a fixed value, enabling both fast processing and precise swelling control through adaptive parameter changes.
Solution Approach 2:
The system uses real-time swelling measurements to provide feedback for temperature adjustment. When swelling reaches desired levels or deviates from targets, the temperature is automatically adjusted to correct the swelling, maintaining precision while enabling faster overall processing through optimized thermal history.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables faster and more efficient pattern formation, reducing processing time and minimizing dewetting, thereby improving the efficiency of nanoscale device fabrication.
Implementation Method 1
The measurement means may comprise optical measurement means. The optical measurement means may comprise at least one of a reflectometer, an ellipsometer.
Implementation Method 2
The temperature control means may comprise a thermoelectric cooling module.
Implementation Method 3
measuring swelling of a block copolymer during solvent vapour annealing of the block copolymer
Data Source
AI summary
An apparatus and method which may be used for fabricating nanoscale devices are disclosed. The apparatus comprises measurement means configured to measure swelling of a block copolymer during solvent vapour annealing of the block copolymer. The apparatus also comprises temperature control means configured to receive a control signal indicative of the swelling of the block copolymer. The temperature control means can then control the temperature of the block copolymer as indicated by the control signal.