Copolymer Roll Members for Substrate Cleaning
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Solution Overview
Problem
Abrasive residues from polishing processes contaminate roll members in substrate cleaning devices, deteriorating the cleaning effect and requiring improved methods to prevent reverse contamination.
Innovation Solution
A substrate cleaning device featuring first and second roll members made of a copolymer of polyvinyl alcohol and polyvinylamine, which are designed to have a zeta potential matching that of the abrasive residues, preventing adsorption and contamination during scrub cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional roll members are used for scrub cleaning, then cleaning action is provided, but abrasive residues contaminate the roll members causing deterioration of cleaning effect
Solution Approach 1:
The patent changes the zeta potential parameter of the roll member surface by selecting specific polymers (anionic polymers with negative zeta potential) to match the zeta potential of abrasive residues. This parameter matching prevents electrostatic attraction and adsorption of abrasive residues onto the roll member surface, thereby eliminating reverse contamination while maintaining cleaning effectiveness.
Solution Approach 2:
The patent employs composite material selection by using specific anionic polymers (such as polyacrylic acid, polyacrylamide, or carboxymethyl cellulose) that possess both the required mechanical properties for scrubbing and the appropriate surface charge characteristics. These composite polymer materials provide both cleaning function and anti-contamination properties simultaneously.
2Object-generated harmful factors
If roll members are made of materials that adsorb abrasive residues, then contamination is reduced, but cleaning ability deteriorates
Solution Approach 1:
The patent carefully selects polymers with specific zeta potential values that match the abrasive residues, creating electrostatic repulsion rather than attraction. This parameter optimization ensures that the roll member surface does not adsorb abrasive residues while maintaining sufficient friction and mechanical action for effective cleaning, thus preserving cleaning ability without contamination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The copolymer roll members effectively limit reverse contamination by abrasive residues, enhancing the cleaning ability and maintaining the cleanliness of the device, thereby improving the overall cleaning process.
Implementation Method 1
The first roll member and the second roll member each may include a copolymer of polyvinyl alcohol and polyvinylamine... having a zeta potential matching that of the abrasive residues, preventing adsorption and contamination
Data Source
AI summary
A substrate cleaning device may include a first roll member and a second roll member including a copolymer of a first water-soluble polymer and a second water-soluble polymer. The first roll member may include a first roll body extending in a first direction and first protrusions on a surface of the first roll body. The second roll member may include a second roll body extending in the first direction and second protrusions on a surface of the second roll body.