Fluorine-Free Copolymer Surface Leveling Agents
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional surface leveling agents used in lithographic patterning often cause defects due to their hydrophobic nature, particularly when containing silicon or fluorine moieties, and pose regulatory concerns, necessitating the development of alternatives that provide effective surface leveling without these moieties.
Innovation Solution
A copolymer comprising polyoxetane units with ether linkages in the backbone, optionally with additional functional side chains, is used as a surface leveling agent, which is free of fluorine and silicon, enhancing miscibility with water and bases while maintaining hydrophobicity for interface migration, thus minimizing defect formation and complying with environmental regulations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional surface leveling agents containing silicon or fluorine moieties are used, then good surface leveling properties are achieved, but defect formation increases and regulatory concerns arise
Solution Approach 1:
The patent changes the chemical composition parameters by eliminating fluorine and silicon moieties from the surface leveling agent structure. The copolymer uses alternative units (formulae 1 and 2) that do not contain these problematic elements, thereby maintaining surface leveling functionality while removing the source of defects and regulatory issues
Solution Approach 2:
The invention creates a composite polymer structure combining specific units (formula 1 with R1-R2 groups and formula 2 with R3 groups) to achieve the desired balance of hydrophobicity for surface migration and hydrophilicity for base solubility, without relying on fluorine or silicon-containing components
2Reliability
If surface leveling agents with hydrophobic nature are used, then effective surface migration and leveling are achieved, but miscibility with water and aqueous developers deteriorates
Solution Approach 1:
The copolymer structure incorporates different functional units at different positions: units with ether linkages and hydrophilic groups (formula 1) provide water miscibility, while units with hydrophobic character (formula 2) provide surface migration capability. This local differentiation of properties within the same polymer chain resolves the contradiction
Solution Approach 2:
The copolymer is designed to perform multiple functions simultaneously: it provides surface leveling, maintains miscibility with water and aqueous developers, and ensures base solubility. The combination of different polymerized units enables this multi-functionality that single-component agents cannot achieve
3Reliability
If surface leveling agents containing fluorine are used, then good surface tension reduction is achieved, but environmental compliance deteriorates
Solution Approach 1:
The patent extracts and removes fluorine from the molecular structure of the surface leveling agent. By using alternative polymer units that do not contain fluorine, the invention maintains the necessary surface activity and surface tension reduction properties while eliminating the environmentally problematic element
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The copolymer surface leveling agent effectively reduces defect formation in lithographic patterns, is miscible with water and aqueous developers, and meets environmental standards by eliminating fluorine and silicon, offering improved hydrophilicity and hydrophobicity for efficient surface leveling.
Implementation Method 1
This ability to migrate to a surface (i.e., molecular mobility) facilitates the flow and leveling of the surface/interfacial layer to produce flat smooth surface/interfaces
Implementation Method 2
Surface leveling agents generally comprise polymers or oligomers that have a lower surface energy when compared with other molecules in the solution and the low surface energy causes them to selectively segregate to the free surface
Implementation Method 3
The copolymer is free of fluorine and silicon, enhancing miscibility with water and bases while maintaining hydrophobicity for interface migration
Implementation Method 4
enhancing miscibility with water and bases while maintaining hydrophobicity for interface migration
Data Source
AI summary
Disclosed herein is a copolymer comprising first polymerized units of the formula (1):wherein: R1 is H or a substituted or unsubstituted C1-C6 alkyl group; and R2 is a substituted or unsubstituted C3-C20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, —C(O)—NR—; wherein R is H or a substituted or unsubstituted C1-C6 alkyl group; andsecond polymerized units of the formula (2):wherein: R3 is a substituted or unsubstituted C1-C6 alkyl group that optionally includes one or more of —O—, —N—, —S—, —C(O)—, or —C(O)O—; wherein the first polymerized units and the second polymerized units are chemically different, and the copolymer is free of fluorine.