Copper-Bonded Glass Modules for CTE-Matched Chip Packaging

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional semiconductor packages face limitations in scaling due to thermal expansion mismatch between organic resin and polymer substrates and silicon, leading to increased package size and cost, as well as inefficiencies in high-speed signal routing and power delivery.

Innovation Solution

The use of glass modules and substrates with copper bonding to create CTE-matched active circuitry, allowing for higher current density connections and reduced module dimensions, along with optimized through-glass vias for power delivery, facilitates efficient module-to-module communication and power transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional organic resin and polymer substrates are used in semiconductor packages, then ease of manufacture is improved, but thermal expansion mismatch with silicon causes increased package size and reduced reliability

Engineering Contradiction:
Improveease of manufactureVSAvoidreliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the material parameter (thermal expansion coefficient) by replacing organic resin and polymer substrates with glass substrates that have CTE values matched to silicon (2.6-3.3 ppm/°C), thereby resolving the thermal expansion mismatch problem while maintaining manufacturability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite material structures including glass substrates with copper interconnection layers and through-glass vias, combining materials with complementary properties to achieve both CTE matching and high electrical conductivity for reliable high-speed signal routing

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If conventional substrates are used, then ease of manufacture is maintained, but signal routing efficiency and power delivery capability deteriorate

Engineering Contradiction:
Improveease of manufactureVSAvoidsignal routing efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent replaces conventional trace-based electrical interconnects with three-dimensional vertical through-glass vias filled with copper, substituting the traditional planar routing mechanism with a vertical conduction path that enables higher current density and more efficient power delivery

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transitions from two-dimensional planar signal routing on substrate surfaces to three-dimensional vertical interconnection through the glass substrate, utilizing the depth dimension to create direct through-glass via paths that shorten current paths and improve signal routing efficiency

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Stability of the object's composition

If copper bonding is implemented for CTE matching, then thermal expansion compatibility is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvethermal expansion compatibilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent performs preliminary copper deposition and via formation in the glass substrate before final assembly, pre-establishing the copper interconnection paths and through-glass vias to simplify subsequent bonding operations and reduce overall manufacturing complexity

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The glass substrate with integrated copper interconnections and through-glass vias serves multiple functions simultaneously: CTE matching with silicon, high-speed signal routing, and power delivery, consolidating what would otherwise require separate components into a single multi-functional element

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Productivity

If module dimensions are reduced for higher density, then bandwidth density is improved, but thermal management and signal integrity become more difficult

Engineering Contradiction:
Improvebandwidth densityVSAvoidsignal integrity
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent changes the interconnection geometry parameter by implementing vertical through-glass vias that provide direct, short current paths with minimal resistance and inductance, maintaining signal integrity even as module dimensions are reduced for higher density configurations

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses glass material with superior thermal and electrical properties compared to conventional organic substrates, providing stable signal transmission and effective thermal management in compact high-density module configurations

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reduced package dimensions, increased bandwidth density, and efficient power delivery, addressing thermal expansion mismatch and signal routing inefficiencies, while supporting higher compute capabilities and memory bandwidth.

Implementation Method 1

The apparatus includes one or more dies, an interposer formed of a first material, the interposer coupled to the one or more silicon dies, the interposer including an interconnection layer formed on one side of the interposer, wherein the interconnection layer includes a plurality of copper interconnects

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

bonding, via a copper bonding process, the first interconnection layer to a first top layer of the substrate

Methodology Applied
Scientific EffectCopper bonding: Welding

Data Source

PatentUS12199007B2Copper connected glass modules on a glass board
Publication Date: 2025.01.14 AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LTD
  • US12199007B2 patent drawing
  • US12199007B2 patent drawing
  • US12199007B2 patent drawing

AI summary

Copper-connected glass modules on a glass board are provided. An apparatus includes one or more dies, an interposer formed of a first material, the interposer coupled to the one or more silicon dies, the interposer comprising an interconnection layer formed on one side of the interposer, wherein the interconnection layer includes a plurality of copper interconnects, and a substrate comprising a top layer, glass core, and a bottom layer, wherein the interconnection layer of the interposer and the top layer of the substrate are copper bonded.