Copper Bonding Wire Pd Layer for High-Temperature Reliability

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Solution Overview

Problem

Copper bonding wires face challenges in high-temperature and high-humidity environments, leading to decreased bonding strength and increased electrical resistance, limiting their use in vehicle-mounted LSIs and other severe conditions.

Innovation Solution

A copper bonding wire with a ball-bonded portion that exhibits a specific relative compound ratio of CuAl phase, along with a concentrated layer of Pd, Au, or Ag, and a Cu alloy layer, to enhance bonding reliability and resistance to corrosion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If copper bonding wire is used to reduce material cost, then material cost is reduced, but bonding strength decreases due to oxidation on wire surface

Engineering Contradiction:
Improvematerial costVSAvoidbonding strength
Core Design Contradiction:
Quantity of substanceVSStrength

Solution Approach 1:

A Pd-containing layer is introduced as an intermediary between the Cu core and the Al electrode. This intermediate layer prevents direct oxidation of Cu and controls the formation of intermetallic compounds, thereby maintaining bonding strength while using inexpensive Cu material

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The bonding wire is designed as a composite structure with a Cu core and a Pd-containing outer layer. This composite structure combines the low cost of Cu with the oxidation resistance and bonding performance of Pd, resolving the contradiction between material cost and bonding strength

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If copper bonding wire is used to reduce material cost, then material cost is reduced, but corrosion resistance decreases in high-humidity/temperature environment

Engineering Contradiction:
Improvematerial costVSAvoidcorrosion resistance
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The Pd-containing layer serves as a protective intermediary that prevents corrosive substances from reaching and attacking the Cu core, thereby improving corrosion resistance in high-humidity/temperature environments while maintaining the low cost advantage of Cu

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The Pd-containing layer creates an inert protective environment around the Cu core, preventing oxidation and corrosion reactions by blocking the interaction between Cu and corrosive substances in the surrounding environment

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Quantity of substance

If copper bonding wire is used to reduce material cost, then material cost is reduced, but electrical resistance increases after reliability tests

Engineering Contradiction:
Improvematerial costVSAvoidelectrical resistance stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The Pd-containing layer acts as a stable intermediary that prevents excessive intermetallic compound formation and oxidation, thereby maintaining low electrical resistance and stable electrical properties after reliability tests while using cost-effective Cu material

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly improves the long-term reliability of copper bonding wires in high-temperature and high-humidity environments, ensuring stable bonding strength and resistance to corrosion, making them suitable for vehicle-mounted LSIs and other demanding applications.

Implementation Method 1

a wire front end is heated and melted through an arc heat input so as to allow a ball to be formed through a surface tension

Methodology Applied
Scientific EffectArc heat input: Electric Arc

Implementation Method 2

a wire front end is heated and melted through an arc heat input so as to allow a ball to be formed through a surface tension

Methodology Applied
Scientific EffectSurface tension: Surface Tension

Implementation Method 3

press-bonding this ball to an electrode of a semiconductor device heated in a range of 150-300° C., and then directly bonding the bonding wire to an external lead side through ultrasonic bonding

Methodology Applied
Scientific EffectUltrasonic bonding: Ultrasonic Vibration

Implementation Method 4

press-bonding this ball to an electrode of a semiconductor device heated in a range of 150-300° C.

Methodology Applied
Scientific EffectThermal heating: Heating

Data Source

PatentUS8653668B2Copper bonding wire for semiconductor device and bonding structure thereof
Publication Date: 2014.02.18 NIPPON STEEL CHEM & MATERIAL CO LTD
  • US8653668B2 patent drawing
  • US8653668B2 patent drawing
  • US8653668B2 patent drawing

AI summary

A bonding structure and a copper bonding wire for semiconductor device include a ball-bonded portion formed by bonding to the aluminum electrode a ball formed on a front end of the copper bonding wire. After being heated at any temperature between 130° C. and 200° C., the ball-bonded portion exhibits a relative compound ratio R1 of 40-100%, the relative compound ratio R1 being a ratio of a thickness of a Cu—Al intermetallic compound to thicknesses of intermetallic compounds that are composed of Cu and Al and formed on a cross-sectional surface of the ball-bonded portion.