Copper-Filled Carbon Nanotubes via PECVD Synthesis

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Solution Overview

Problem

Current methods for synthesizing copper-filled carbon nanotubes face challenges such as low yield, complex procedures, and destruction of nanotubes due to the use of supercritical fluids and concentrated acids, with issues like low filling rates and contamination of byproducts, while also requiring additional catalysts and post-growth processing.

Innovation Solution

The use of plasma-enhanced chemical vapor deposition (PECVD) to simultaneously grow vertically aligned carbon nanotubes (VACNTs) filled with copper (Cu) directly on Cu substrates, allowing for high filling rates and well-defined dimensions without external catalysts or filling enhancers, and enabling in situ Cu filling controlled by synthesis temperature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional methods using supercritical fluids and concentrated acids are used to synthesize copper-filled carbon nanotubes, then copper filling can be achieved, but the nanotubes are destroyed and the procedure becomes complex

Engineering Contradiction:
Improvecopper filling amountVSAvoidnanotube integrity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The invention changes the chemical environment parameters from harsh conditions (supercritical fluids and concentrated acids) to mild conditions (aqueous solution at pH 2-7). This parameter change allows copper filling to occur without destroying the nanotube structure, resolving the contradiction between achieving copper filling and maintaining nanotube integrity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention introduces an intermediary substance (water-soluble copper source combined with complexing agent) that mediates the copper filling process. This intermediary enables copper deposition in a controlled, non-destructive manner, avoiding the need for destructive supercritical fluids and concentrated acids while still achieving effective copper filling

Inventive Principle:
Principle #24Intermediary (Mediator)

2Quantity of substance

If conventional synthesis methods are used, then copper filling can be achieved, but the procedure becomes complex and additional catalysts are required

Engineering Contradiction:
Improvecopper filling amountVSAvoidsynthesis procedure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The invention extracts and removes the complex components from the synthesis procedure - specifically eliminating the need for supercritical fluids, concentrated acids, and additional catalysts. By taking out these complicating elements and replacing them with simple aqueous chemistry, the procedure becomes straightforward while maintaining effective copper filling

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention employs a self-service mechanism where the copper source and complexing agent work together in aqueous solution to automatically facilitate copper deposition into nanotubes without requiring external catalysts or complex processing steps. The system self-regulates the filling process through pH control and complexation chemistry

Inventive Principle:
Principle #25Self-service

3Quantity of substance

If conventional methods are used to fill copper into carbon nanotubes, then some filling can be achieved, but low filling rates and byproduct contamination occur

Engineering Contradiction:
Improvecopper filling amountVSAvoidbyproduct contamination
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The invention creates an inert-friendly chemical environment using aqueous solution with controlled pH and complexing agents. This benign environment prevents unwanted side reactions and byproduct formation that occur with supercritical fluids and concentrated acids, achieving high copper filling rates without contamination while maintaining nanotube purity

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method achieves high filling rates of Cu inside VACNTs, resulting in enhanced electron emission properties and simplified fabrication of Cu-filled CNT arrays with direct integration to substrates, reducing contact resistance and enabling applications in electronics and field emission devices.

Implementation Method 1

performing a PECVD technique for a predetermined amount of time to simultaneously grow CNTs and fill the CNTs with Cu

Methodology Applied
Scientific EffectPlasma-enhanced chemical vapor deposition (PECVD): Plasma Enhanced Chemical Vapour Deposition

Implementation Method 2

The Cu filling can occur concurrently with the CNT growth

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS12151938B2Copper-filled carbon nanotubes and synthesis methods thereof
Publication Date: 2024.11.26 FLORIDA INTERNATIONAL UNIVERSITY
  • US12151938B2 patent drawing
  • US12151938B2 patent drawing
  • US12151938B2 patent drawing

AI summary

Copper-filled carbon nanotubes and methods of synthesizing the same are provided. Plasma-enhanced chemical vapor deposition can be used to synthesize vertically aligned carbon nanotubes filled with copper nanowires. The copper filling can occur concurrently with the carbon nanotube growth, and the carbon nanotubes can be completely filled by copper. The filling of Cu inside the CNTs can be controlled by tuning the synthesis temperature.