Copper Gate Wiring Oxide Coating for LCD Adhesion and Reliability
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Solution Overview
Problem
Conventional techniques for liquid crystal display devices using copper wiring face challenges in achieving low resistivity, high adhesiveness to substrates, and oxidation resistance, leading to increased process steps and electrical resistance, while existing solutions fail to provide a satisfactory configuration for gate wiring structures.
Innovation Solution
A liquid crystal display device with gate wiring or electrodes formed on a TFT substrate, where a copper alloy is covered with an oxide layer having a compositional formula of CuXMnYSiZO, with 0<X<Y and 0<Z<Y, and an additive element like Mn, to enhance adhesiveness and prevent oxidation, while reducing the number of process steps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple layers are added to copper wiring to prevent oxidation, then oxidation resistance is improved, but process complexity increases
Solution Approach 1:
The patent combines multiple functions into integrated layers: the alloy layer simultaneously provides oxidation resistance and adhesion promotion, while the oxide layer provides both protection and bonding. This merging reduces the number of separate process steps compared to conventional multi-layer approaches.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves low electrical resistance close to that of pure copper, improved adhesiveness to glass substrates, and reduced process complexity, effectively addressing the challenges of hillock, electromigration, and oxidation issues in copper wiring.
Implementation Method 1
make an additive element form oxide on the Cu surface to thereby make the oxide act as an oxidation resistant film for Cu
Implementation Method 2
a second layer consisting of an oxide covering an outer circumferential part of the first layer
Implementation Method 3
make an alloying element form reaction products with a substrate to thereby ensure adhesiveness to the substrate
Data Source
AI summary
A liquid crystal display device including gate wiring or a gate electrode formed on a substrate on a TFT side of the TFT liquid crystal display device, wherein the wiring or the electrode has a structure of being held between two different insulation layers or insulators, and the structure is comprised of a first layer mainly consisting of copper and a second layer consisting of an oxide covering an outer circumferential part of the first layer, further, the second layer has compositional formula of CuxMnySizO (0<X<Y, 0<Z<Y).