Copper Nanoparticle-Nanowire Paste for Low-Temperature Bonding

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Solution Overview

Problem

Current methods for copper-to-copper bonding in microelectronics require high temperature and pressure, and Sn-based solders cause reliability concerns due to aggressive reactions and brittle intermetallic compounds, limiting their application in semiconductor processes and electronics packaging.

Innovation Solution

A conductive paste comprising a mixture of copper nanoparticles and nanowires with a specific weight ratio, where the nanoparticles are fused at a low temperature to form a strong and reliable interconnection without mechanical pressure, utilizing the nanowires to enhance mechanical and electrical properties by preventing crack propagation and solvent escape.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If Sn-based solder is used for joining microelectronics devices, then bonding can be achieved at low temperature (200-250°C), but aggressive reactions with copper bump and UBM cause reliability concerns and form brittle intermetallic compounds

Engineering Contradiction:
Improvebonding temperatureVSAvoidjoint reliability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent uses copper nanopowder as the bonding material, which is homogeneous with the copper bump and UBM (both copper-based). This homogeneous composition prevents aggressive intermetallic reactions between dissimilar metals, eliminating the reliability issues associated with Sn-based solder while maintaining low-temperature bonding capability.

Inventive Principle:
Principle #33Homogeneity

Solution Approach 2:

The patent employs a composite structure of copper nanopowder with organic vehicle and binder, creating a conductive paste that combines the benefits of copper (homogeneous bonding, low reactivity) with processable material properties (printability, adhesion), enabling reliable low-temperature bonding without the harmful effects of traditional solders.

Inventive Principle:
Principle #40Composite materials

2Reliability

If copper nanopowder is used for bonding, then homogeneous joining avoids aggressive reactions, but high temperature and pressure are required to achieve reliable Cu-Cu bonding

Engineering Contradiction:
Improvebonding reliabilityVSAvoidbonding temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent changes the physical state and size parameters of copper from bulk or large particles to nanopowder with specific surface area and reactivity characteristics. This parameter change enables copper-copper bonding at low temperature (200-250°C) without requiring high pressure, while maintaining homogeneous joining that avoids aggressive reactions.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces an organic vehicle and binder as intermediaries that facilitate the bonding process. The organic vehicle provides a medium for nanopowder dispersion and printability, while the binder ensures adhesion to substrates and maintains structural integrity during processing, enabling low-temperature reliable bonding without direct high-temperature Cu-Cu contact.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If copper nanopowder is used for bonding, then homogeneous joining avoids aggressive reactions, but mechanical pressure is typically required to achieve reliable bonding

Engineering Contradiction:
Improvebonding reliabilityVSAvoidbonding pressure
Core Design Contradiction:
ReliabilityVSStress or pressure

Solution Approach 1:

The patent changes the size parameter of copper from bulk or large particles to nanopowder with high surface area to volume ratio. This parameter change increases reactivity and bonding efficiency, enabling reliable Cu-Cu bonding without requiring mechanical pressure, thus simplifying the bonding process while maintaining high reliability through homogeneous joining.

Inventive Principle:
Principle #35Parameter changes

4Reliability

If traditional copper bonding methods are used, then reliable bonding can be achieved, but processing costs increase and applications to semiconductor processes are limited

Engineering Contradiction:
Improvebonding reliabilityVSAvoidmanufacturing cost and processability
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces traditional mechanical bonding methods (requiring high pressure and temperature equipment) with a printable paste approach. The copper nanopowder formulated in organic vehicle and binder can be deposited using conventional printing techniques, substituting complex mechanical bonding systems with simpler, more cost-effective printing processes suitable for semiconductor manufacturing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical form of copper from bulk metal requiring mechanical processing to nanopowder with optimized surface properties. This parameter change enables the copper to be formulated into a printable paste with controlled viscosity and flow characteristics, facilitating easy application through printing methods and reducing manufacturing costs while maintaining bonding reliability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The copper nanoparticle-nanowire composite enables reliable and stable bonding at low temperatures, improving mechanical and electrical properties while reducing processing costs and avoiding aggressive inter-diffusion reactions, thus extending its application in various electronics joining processes.

Implementation Method 1

utilizing the nanowires to enhance mechanical and electrical properties by preventing crack propagation

Methodology Applied
Scientific EffectCrack propagation prevention: Fracture Mechanics

Implementation Method 2

utilizing the nanowires to enhance mechanical and electrical properties by preventing crack propagation and solvent escape

Methodology Applied
Scientific EffectSolvent escape through nanowire networks: Evaporation

Implementation Method 3

the nanoparticles are fused at a low temperature to form a strong and reliable interconnection

Methodology Applied
Scientific EffectLow-temperature fusion: Sintering

Data Source

PatentEP3251129B1Conductive paste, method for forming an interconnection
Publication Date: 2020.12.23 LOCKHEED MARTIN CORP
  • EP3251129B1 patent drawingFigure 1A~1D
  • EP3251129B1 patent drawingFigure 2A
  • EP3251129B1 patent drawingFigure 2B

AI summary

34 CONDUCTIVE PASTE, METHOD FOR FORMING AN INTERCONNECTION AND ELECTRICAL DEVICE ABSTRACT 5 According to embodiments of the present invention, a conductive paste is provided. The conductive paste has a composition including a plurality of conductive nanoparticles and a plurality of conductive nanowires, wherein a weight ratio of the plurality of conductive nanoparticles to the plurality of conductive nanowires is between about 10:1 and about 50:1. According to further embodiments of the present invention, a method for forming 10 an interconnection and an electrical device are also provided. Figure 3B