Uniform Core-Shell Nanoparticle Films via ALD and Polymer Spacing

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Solution Overview

Problem

Current methods for fabricating core-shell nanoparticles on a substrate face challenges such as non-uniform shell formation and limited material options, making it difficult to achieve a uniform pattern, especially for applications like magnetic recording disks.

Innovation Solution

A method involving the use of polymer-attached core nanoparticles, where atomic layer deposition (ALD) grows a shell material around the cores, with polymer chains spacing and stabilizing the nanoparticles, allowing for uniform arrangement and complete shell formation, including under the substrate surface, using non-reactive precursors to prevent polymer interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If oxidation or reduction chemistry of bulk core nanoparticles is used, then core-shell nanoparticles can be formed, but it is difficult to process core-shell nanoparticles after formation and limits the type of materials that can be used for the shell

Engineering Contradiction:
Improvematerial options for shellVSAvoidprocessing difficulty after formation
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The fabrication process is segmented into distinct stages: first forming core nanoparticles with polymer attachments in solution, then depositing the core-polymer composite on substrate, and finally growing shell material via ALD. This segmentation allows independent optimization of each step and enables greater material versatility.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The polymer acts as an intermediary between the core nanoparticles and the shell material. The polymer chains attach to the core surfaces and extend into the shell material during ALD, facilitating uniform shell growth and enabling processing that would be difficult with direct core-shell synthesis.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If a film of core nanoparticles is deposited on a substrate and subsequently coated from the top with shell material, then shell formation is achieved, but the shells are non-uniform

Engineering Contradiction:
Improveshell uniformityVSAvoidfabrication complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The polymer chains are attached to the core nanoparticles before substrate deposition. This preliminary action ensures that when the cores are deposited on the substrate, the polymer chains are already positioned to guide uniform shell material growth from all directions, including underneath the cores.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The mechanical coating process from the top is replaced with chemical vapor deposition via ALD. The ALD process uses vapor-phase precursors that diffuse through and react with the core surfaces, enabling conformal shell growth that is uniform regardless of the core's position on the substrate.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If ALD is used to grow shell material on cores with polymer attachment, then complete shell formation including under substrate surface is achieved, but polymer removal is required as an additional step

Engineering Contradiction:
Improvecomplete shell coverageVSAvoidprocess steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The polymer serves as a temporary intermediary that enables complete shell formation during ALD. The polymer chains remain during the ALD process to guide uniform shell growth, then are removed in a controlled manner after the shell is fully formed, achieving complete coverage without compromising the shell structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The polymer is attached to the cores in advance to enable the ALD process to form complete shells. The polymer's presence during shell growth ensures uniform coverage, and its subsequent removal is a planned preliminary action that enables the desired final structure.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the formation of uniformly arranged core-shell nanoparticles with precise control over shell thickness, suitable for magnetic recording disks and etch masks, enhancing material versatility and application in bit-patterned media and nanoimprinting.

Implementation Method 1

The nanoparticle cores are placed in a solution containing a polymer having an end group for attachment to the cores

Methodology Applied
Scientific EffectPolymer attachment: Chemical Bonding

Implementation Method 2

The nanoparticle cores being generally uniformly arranged on the substrate and spaced apart by the attached polymer chains

Methodology Applied
Scientific EffectDispersion: Dispersion (of waves)

Implementation Method 3

After the film has been deposited on the substrate, atomic layer deposition (ALD) is used to grow the shell material on the cores, using two precursors for the shell material that are non-reactive with the polymer

Methodology Applied
Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Implementation Method 4

The polymer chains also form between the cores and the substrate surface, so the ALD forms shell material completely surrounding the cores

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 5

Repeated cycles of precursor introduction into the ALD chamber grow the shells to the desired thickness

Methodology Applied
Scientific EffectCyclic deposition: Chemical Vapour Deposition

Data Source

PatentUS8926851B2Method for making a film of uniformly arranged core-shell nanoparticles on a substrate
Publication Date: 2015.01.06 WESTERN DIGITAL TECHNOLOGIES INC
  • US8926851B2 patent drawing
  • US8926851B2 patent drawing
  • US8926851B2 patent drawing

AI summary

A method for making a film of core-shell nanoparticles generally uniformly arranged on a substrate uses atomic layer deposition (ALD) to form the shells. The nanoparticle cores are placed in a solution containing a polymer having an end group for attachment to the cores. The solution is then applied to a substrate and allowed to dry, resulting in the nanoparticle cores being uniformly arranged by the attached polymer chains. ALD is then used to grow the shell material on the cores, using two precursors for the shell material that are non-reactive with the polymer. The polymer chains also form between the cores and the substrate surface, so the ALD forms shell material completely surrounding the cores. The uniformly arranged core-shell nanoparticles can be used as an etch mask to etch the substrate.