Core-Shell Nanowire Doping via CVD

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Solution Overview

Problem

The challenge in manufacturing nanowires lies in controlling doping characteristics, particularly due to the difficulty in uniformity and precision in doping processes using wet chemical methods, which affects their electrical and optical properties, making it hard to integrate them into semiconductor devices effectively.

Innovation Solution

A wire structure with a core-shell configuration is developed, where the first wire core and the second wire extending from it have different doping characteristics, with a carbon shell surrounding the core, allowing for precise control of doping through chemical vapor deposition (CVD) and the use of crystalline or amorphous carbon layers, enabling the formation of p-n junctions at desired positions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If wet chemical method is used to manufacture nanowires, then manufacturing process is simple, but doping uniformity and precision deteriorate

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoiddoping uniformity and precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces wet chemical methods with vapor-phase synthesis (CVD) to achieve precise doping control. The vapor-phase approach allows dopant materials to be injected during nanowire growth through gas-phase transport, enabling uniform distribution and precise control of doping characteristics that cannot be achieved with liquid-phase wet chemical methods.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical state of the doping process from liquid-phase (wet chemical) to gas-phase (vapor deposition). This parameter change enables better control over dopant delivery, concentration, and uniformity during nanowire synthesis, directly addressing the precision issue while maintaining manufacturing feasibility through established CVD techniques.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If dopant material is injected during nanowire synthesis, then doping is achieved, but control over doping characteristics deteriorates

Engineering Contradiction:
Improvedoping achievementVSAvoiddoping characteristics control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent employs preliminary action by preparing catalyst structures with specific geometries and compositions before nanowire growth. The catalyst pattern and composition are pre-designed to control the injection timing, location, and amount of dopant materials during subsequent vapor-phase synthesis, enabling precise doping characteristics rather than random injection during growth.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent applies local quality by creating spatially varying doping characteristics through patterned catalyst structures. Different regions of the nanowire array receive different dopant concentrations and types by locally modifying catalyst properties, enabling p-n junction formation and differentiated doping zones within the same nanowire structure.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If nanowire diameter is reduced to increase surface area to volume ratio, then reactivity increases, but control over electrical properties deteriorates

Engineering Contradiction:
ImprovereactivityVSAvoidelectrical property control
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent uses composite material structures with core-shell configurations where the core nanowire provides high surface-area-to-volume ratio for reactivity, while the shell layer (formed through selective doping or coating) provides controlled electrical properties. This composite approach allows simultaneous achievement of high reactivity from the nanoscale core and controlled electrical characteristics from the structured shell.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent segments the nanowire structure into functionally distinct regions through differential doping along the longitudinal axis and radial direction. This segmentation creates zones with different electrical properties (e.g., n-type and p-type regions) while maintaining the overall nanoscale dimensions for high reactivity, effectively decoupling the two requirements.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the creation of nanowires with controlled doping characteristics, enhancing their thermal and electrical properties, making them suitable for applications in electronic, optical, and energy fields by enabling precise control over p-n junction formation.

Implementation Method 1

allowing for precise control of doping through chemical vapor deposition (CVD)

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Data Source

PatentUS9373602B2Wire structure and semiconductor device having the same, and method of manufacturing the wire structure
Publication Date: 2016.06.21 SAMSUNG ELECTRONICS CO LTD
  • US9373602B2 patent drawing
  • US9373602B2 patent drawing
  • US9373602B2 patent drawing

AI summary

According to example embodiments, a wire structure includes a first wire that includes a first wire core and a first carbon shell surrounding the first wire core, and a second wire that extends in a longitudinal direction from the first wire. The first wire core has a wire shape. The first carbon shell contains carbon.