Coriolis Sensor Driving Masses Elastic Coupling Shock Resistance
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Solution Overview
Problem
Existing Coriolis rate of rotation sensors are sensitive to external force influences, leading to imprecise measurements and potential damage from impacts.
Innovation Solution
A micromechanical Coriolis rate of rotation sensor design featuring driving masses connected by elastic elements on either side of the detection axis, allowing for synchronized deflection in the same direction during impacts, reducing sensitivity to shocks and enabling detection of shock effects to prevent false measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If two driving masses are coupled by a central spring element, then the sensor structure is simplified, but the sensor becomes sensitive to external force influences and impacts
Solution Approach 1:
The patent divides the coupling system into multiple elastic connecting elements distributed on both sides of the detection axis, rather than using a single central spring. This segmentation allows each element to handle specific directional forces, improving shock resistance while maintaining structural functionality.
Solution Approach 2:
The patent introduces elastic connecting elements as intermediary components between the driving masses and the substrate. These elements mediate the transmission of forces, allowing the system to absorb and distribute impact forces rather than transmitting them directly, thereby reducing sensitivity to external influences.
2Reliability
If driving masses are connected by elastic elements during impacts, then shock resistance is improved, but the device complexity increases
Solution Approach 1:
The elastic connecting elements serve multiple functions simultaneously: they provide mechanical coupling between driving masses, enable tuned oscillation for measurement functionality, and provide shock absorption during impacts. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity.
3Measurement precision
If driving masses oscillate in antiphase during normal operation, then measurement functionality is maintained, but impact detection becomes difficult
Solution Approach 1:
The patent inverts the expected response pattern: during normal operation, driving masses oscillate in antiphase for measurement, but during impacts, the elastic connecting elements cause them to deflect in phase. This inversion of behavior patterns allows the system to use the same signal processing approach for both measurement and impact detection, reducing complexity while improving impact detection capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves enhanced stability and shock resistance, reducing sensitivity to external influences and allowing for accurate detection of impacts, thereby preventing false rotation measurements.
Implementation Method 1
at least one elastic connecting element is disposed on the driving masses on each side of the detection axis (Y-axis) and spaced apart from the Y-axis. The two driving masses are thereby connected to each other, and a mutually tuned oscillation of the two driving masses is enabled.
Implementation Method 2
Drive means for generating a rotational oscillation of the driving masses about the drive axis are further provided at each central suspension. Such drive means are typically electrodes generating an oscillating drive of the driving masses about the central suspension thereof by alternating polarity.
Implementation Method 3
An electrical signal is generated by electrodes disposed between the driving masses and the substrate due to said tilting motion and the resulting change in distance between the driving mass and the substrate
Implementation Method 4
If the substrate is rotated about a measurement axis, then a Coriolis force acting on the rotationally oscillating driving masses causes the two driving masses to rotate or tip about a detection axis in an equal and opposite manner.
Data Source
Figure 1~2
Figure 3
Figure 4
AI summary
A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.