Corona Charge Deposition Control With HV Amplifier Feedback
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Solution Overview
Problem
Current corona charge deposition systems face challenges in precisely controlling charge deposition on semiconductor wafers due to unstable voltage outputs and interference from external currents, leading to unpredictable charge distribution and reduced precision in characterizing wafer properties.
Innovation Solution
The implementation of high-voltage amplifiers that can source and sink currents, combined with a microcontroller for closed-loop control, allows for stable and precise voltage management across electrodes, along with 3D printed components for improved electrical isolation and charge dissipation, enabling precise control of corona charge deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional voltage sources are used to supply voltage to electrodes in corona charge deposition systems, then the system structure is simple, but the voltage output is unstable and susceptible to external current interference
Solution Approach 1:
The patent implements feedback control by monitoring the actual voltage output and comparing it with the reference voltage, then adjusting the power supply through error signal correction. This closed-loop feedback mechanism compensates for external current interference and maintains stable voltage output despite varying operating conditions.
Solution Approach 2:
The patent introduces an intermediary voltage regulation stage between the power source and the electrodes. This intermediate control layer includes voltage sensing and adjustment circuits that isolate the electrodes from direct exposure to external current fluctuations, thereby stabilizing the voltage applied to the corona discharge system.
2Manufacturing precision
If multiple independent voltage sources are used to control different electrodes, then the charge deposition precision is improved, but the system complexity and cost increase
Solution Approach 1:
The patent designs a multi-functional voltage control system where a single power supply unit can independently regulate voltage to multiple different electrodes through separate controllable switches and regulation circuits. This universal voltage source performs the function of multiple independent sources while reducing system complexity and cost.
Solution Approach 2:
The patent segments the voltage control function into independent controllable channels within a unified power supply system. Each electrode receives voltage through its own controlled pathway with independent adjustment capabilities, allowing precise control of charge deposition on different electrodes while sharing common power generation and control infrastructure.
3Reliability
If voltage sources that cannot sink current are used, then the system is easier to operate, but the voltage becomes unpredictable when external current flows into the output
Solution Approach 1:
The patent employs feedback control mechanisms that continuously monitor voltage output and automatically adjust the power supply state to compensate for external current injection. This feedback loop ensures predictable voltage operation even when current flows into the output, eliminating the limitation of conventional voltage sources that cannot handle bidirectional current flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the precision and stability of charge deposition, improving the flexibility and repeatability of the process, allowing for accurate characterization of semiconductor wafers and minimizing the impact of external interference.
Implementation Method 1
a corona needle to generate positive and negative corona charge
Implementation Method 2
components for holding a corona electrode can be fabricated from 3D printed material having a high dielectric constant to provide electrical isolation
Implementation Method 3
3D printable materials used to fabricate components surrounding (or in the vicinity) of the corona gun mask may be selected from charge dissipative materials or static-dissipative materials to dissipate charge
Data Source
AI summary
The present invention relates to corona charge deposition systems that use High Voltage (HV) amplifiers for precisely controlling corona charge deposition. Some implementations, provide a corona charge deposition system that uses multiple voltage sources to maintain specified voltages applied on several electrodes to precisely control the corona current required to deposit a desired amount of charge on a sample. The HV amplifiers are able to source and sink currents to maintain stable voltages applied on control electrodes in the presence of a higher voltage applied on a needle electrode. The proposed apparatus and method of monitoring multiple signals, controlling multiple voltages, and predicting charge profile deposited on a sample can precisely control charge deposition processes.