Corrosive Gas Container Surface Control for Corrosion Suppression
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Solution Overview
Problem
Existing corrosive gas mixtures, such as hydrogen sulfide and sulfur dioxide, corrode sealed containers made of metals other than stainless steel, posing a risk of metal impurities in semiconductor manufacturing processes.
Innovation Solution
A corrosive-gas-mixture-filled container with a specified water vapor concentration of 400 mol ppm or less and an inner surface roughness of 50 μm or less for the cylindrical body portion, using metals like manganese steel or chromium molybdenum steel, suppresses corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a sealed container is made of metal other than stainless steel, then manufacturing cost and ease of manufacture are improved, but corrosion resistance deteriorates
Solution Approach 1:
The invention changes the parameters of the corrosive gas mixture (specifically water vapor concentration to 400 mol ppm or less) and the container surface (surface roughness maximum height to 50 μm or less) to achieve corrosion suppression. This allows the use of cost-effective metals other than stainless steel while maintaining corrosion resistance through controlled environmental and surface parameters.
2Reliability
If water vapor concentration in corrosive gas mixture is reduced, then corrosion resistance is improved, but manufacturing precision and cost control become more difficult
Solution Approach 1:
The invention specifies a concrete parameter threshold (water vapor concentration of 400 mol ppm or less) that balances corrosion protection with manufacturing feasibility. This quantified parameter provides a clear target for manufacturing processes while ensuring sufficient corrosion resistance.
Solution Approach 2:
The invention applies preliminary action by controlling the water vapor concentration and surface roughness before the corrosion process begins. By pre-establishing these parameter thresholds in the gas mixture and container surface preparation, the system prevents corrosion from occurring in the first place, rather than attempting to mitigate it afterward.
3Reliability
If surface roughness of container inner surface is reduced, then corrosion resistance is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The invention establishes a specific surface roughness parameter (maximum height of 50 μm or less) that provides effective corrosion protection without requiring excessive surface smoothness. This moderate parameter threshold achieves corrosion suppression while avoiding the need for complex and costly ultra-precision surface processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents corrosion of non-stainless steel containers, reducing metal impurities and enhancing the suitability of these containers for semiconductor manufacturing.
Implementation Method 1
a concentration of the water in the corrosive gas mixture is 400 mol ppm or less... corrosion of the sealed container due to the corrosive gas mixture can be suppressed
Implementation Method 2
a maximum height of a surface roughness of an inner surface of the cylindrical body portion is 50 μm or less... the water in the corrosive gas mixture is less likely to be captured in a recess of the inner surface
Data Source
AI summary
A corrosive-gas-mixture-filled container includes a sealed container, and a gas filled in the sealed container and containing a corrosive gas. In the corrosive-gas-mixture-filled container, a concentration of water in a vapor phase in the gas is 400 mol ppm or less, the sealed container includes a cylindrical body portion including a metal layer having an inner surface in contact with a corrosive gas mixture, and a maximum height of a surface roughness of the inner surface of the metal layer of the cylindrical body portion is 50 μm or less.