Coupled MEMS Mirror Array for LiDAR Synchronization
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Solution Overview
Problem
LiDAR systems are often expensive, large, and bulky, limiting their widespread adoption in autonomous vehicles due to the need for multiple emitters to achieve accurate tracking over large ranges and fields-of-view, and face challenges in synchronizing the movement of micro-mirrors in MEMS-based arrays due to manufacturing variations.
Innovation Solution
A MEMS-based micro-electromechanical system (MEMS) apparatus with a support frame and a plurality of mirror elements arranged in a linear array, where each mirror is rotatable on a perpendicular axis, and coupled via a mechanical coupling element to ensure synchronous rotation, reducing the need for large mirrors and improving scanning speed and power efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple emitters are used to achieve accurate tracking over large ranges and fields-of-view, then measurement precision is improved, but device complexity and size increase
Solution Approach 1:
The system segments the scanning function across multiple mirror elements in an array, where each mirror element can be independently controlled to cover different portions of the field-of-view. This allows accurate tracking to be achieved through coordinated operation of multiple simpler components rather than requiring a single complex emitter system.
Solution Approach 2:
Multiple mirror elements are combined into a unified array structure that operates cooperatively to achieve the tracking performance of a more complex single-emitter system. The coupling elements merge the motion control of adjacent mirrors, creating a synchronized system that maintains measurement precision while using simpler individual components.
2Measurement precision
If multiple emitters are used to achieve accurate tracking over large ranges and fields-of-view, then measurement precision is improved, but the system becomes large and bulky
Solution Approach 1:
The system transitions from a single large emitter occupying significant volume to a two-dimensional array of smaller mirror elements. This dimensional reorganization allows the same tracking capability to be achieved with a more compact overall footprint, as the scanning function is distributed across the array surface rather than requiring a single large component.
3Ease of manufacture
If manufacturing variations are present in MEMS-based mirror arrays, then ease of manufacture is improved, but reliability of synchronous movement deteriorates
Solution Approach 1:
Coupling elements are introduced as intermediary mechanical components between adjacent mirror elements. These coupling elements physically connect the mirrors and enforce synchronous motion, compensating for manufacturing variations in individual mirror components. The coupling elements act as mediators that ensure reliable synchronized movement despite tolerances in the manufactured parts.
4Reliability
If mechanical coupling elements are used to ensure synchronous rotation of mirror elements, then reliability of synchronous movement is improved, but device complexity increases
Solution Approach 1:
The coupling elements are designed to flexibly accommodate the rotational motion of mirror elements while maintaining the synchronous connection. This dynamic design allows the coupling structure to adapt to the moving parts without requiring overly rigid and complex mechanical linkages, thereby achieving reliable synchronization with moderate structural complexity.
Data Source
AI summary
Some embodiments include a MEMS apparatus configured to redirect light in a LiDAR system and includes a support frame and a plurality of mirror elements disposed in a linear array within the support frame including a first mirror element and a second mirror element. Each of the plurality of mirror elements can be rotatable on a rotational axis that is perpendicular to a line defined by the linear array of the plurality of mirror elements and bisects the corresponding mirror element into a first portion and a second portion. The apparatus can include a coupling element having a distal end physically coupled to a first portion of the first mirror element and a proximal end physically coupled to a second portion of the second mirror element such that a rotation of the first mirror element causes a synchronous and equal rotation of the second mirror element.