Coupled Low-Power Pulse Generator for High-Voltage Plasma Pulses
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Solution Overview
Problem
Plasma treatment applications, such as etching or layer deposition, require high voltage and high frequency rectangular, asymmetrical, pulsed voltage supplies, which often exceed the voltage handling capabilities of individual semiconductor switches, especially during high frequency operation.
Innovation Solution
A high power generator configured with multiple low power generators, each with an energy storage component, electrically connected through a coupling to achieve higher output values, and a control unit with switching units capable of rapid current rise and voltage transitions, allowing for the generation of step-function pulses without continuous slopes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If individual semiconductor switches are used to generate high voltage pulses, then the device complexity is reduced, but the voltage handling capability is insufficient for high frequency operation
Solution Approach 1:
The patent divides the high power generator into multiple low power generators, each with its own energy storage component and semiconductor switch. This segmentation allows each switch to operate within its voltage handling capabilities while the combined output of multiple generators achieves the required high voltage through the coupling network.
2Power
If multiple low power generators are combined to achieve high voltage output, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
The patent combines multiple low power generators through a coupling network that electrically connects their outputs. The control unit coordinates the switching of individual generators so their outputs merge constructively, achieving high voltage output while keeping each individual generator simple and manageable.
Solution Approach 2:
The control unit dynamically selects and activates specific low power generators based on the required output characteristics. This dynamic control allows the system to achieve high voltage output only when needed, while maintaining simpler operation during normal conditions, thus balancing complexity and performance.
3Productivity
If high frequency operation is required, then the productivity is improved, but the voltage handling requirements exceed individual switch capabilities
Solution Approach 1:
By segmenting the power generation into multiple low power units, each operating at manageable voltage levels, the system can switch between generators at high frequencies without requiring any single switch to handle excessive voltage, thus enabling high frequency operation.
Solution Approach 2:
The control unit implements dynamic switching between multiple low power generators, activating different generators in sequence or parallel based on instantaneous power requirements. This dynamic allocation enables high frequency operation by distributing the switching burden across multiple components rather than overloading a single switch.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient delivery of high power pulses with sharp voltage transitions, effectively addressing the limitations of existing technologies by providing a reliable and efficient high voltage, high current supply for capacitive loads in plasma processes.
Implementation Method 1
Each respective LP generator (14, 16, 18) comprises an energy storage component (C1, C2, Cn), wherein in use the energy storage component is charged to a respective predefined value related to the energy storage component
Implementation Method 2
The control unit (22) comprises switching units (24, 26, 28), having a current rise capability of at least 10 A/μs, and/or having a capability of withstanding a voltage of at least 0.5 kV with voltage rise and fall rates of at least 15 kV/μs
Data Source
AI summary
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The control unit further includes switching units, having a current rise capability of at least 10 A/μs, and/or having a capability of withstanding a voltage of at least 0.5 kV with voltage rise and fall rates of at least 15 kV/μs.