Coupled Low-Power Pulse Generator for Capacitive Plasma Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver high voltage and current efficiently to capacitive loads in plasma processes, particularly in applications requiring high frequency and rectangular, asymmetrical pulsed voltage supplies, as individual semiconductor switches often exceed their voltage handling capabilities.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected in a coupling configuration to achieve higher output values, utilizing transformers with balancing windings and a control unit to selectively activate LP-generators for step-function pulse generation, ensuring efficient power delivery and preventing overcharging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and current to capacitive loads, then the power delivery capability is improved, but the voltage handling capability of individual semiconductor switches is exceeded
Solution Approach 1:
The system divides a single high-power generator into multiple low-power generators (LP-generators), each with its own semiconductor switches operating within safe voltage limits. The LP-generators are coupled together through a coupling network to collectively deliver high power to the capacitive load, thereby achieving high power delivery while maintaining switch reliability.
2Power
If multiple low-power generators are coupled to achieve high power output, then the voltage and current handling capability is improved, but the system complexity increases
Solution Approach 1:
Multiple LP-generators are electrically coupled together through a coupling network that combines their outputs to achieve high power delivery. The control unit coordinates the operation of all LP-generators as a unified system, managing their collective contribution to the high-power output while simplifying the overall control architecture.
3Speed
If LP-generators are selectively activated to generate step-function pulses, then the pulse rise and decay characteristics are improved, but the control complexity increases
Solution Approach 1:
The control unit pre-configures which LP-generators should be activated based on the desired pulse characteristics. By selectively enabling or disabling specific LP-generators before pulse generation, the system achieves precise control over pulse rise and decay rates without requiring complex real-time adjustments during pulse operation.
4Stability of the object's composition
If transformers with balancing windings are used for each LP-generator, then the charging balance is improved, but the component count and cost increase
Solution Approach 1:
Each LP-generator is equipped with its own transformer featuring balancing windings specifically designed to maintain charge balance for that individual generator. This localized approach ensures that each transformer handles only the charging requirements of its associated LP-generator, providing precise balance control without requiring a single complex transformer to manage all generators.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively generates high-power pulses with sharp voltage transitions and reduced power losses, capable of handling high current and voltage demands in plasma processes, enhancing efficiency and reliability while minimizing component costs.
Implementation Method 1
The charging energy of the LP-generators is supplied over a transformer, with a primary winding, and a secondary winding for each LP-generator
Implementation Method 2
The rectifier may comprise at least one semiconductor element such as a diode. The rectifier may comprise four diodes connected in a bridge rectifier way.
Data Source
Figure 1
Figure 2a~2b
Figure 3
AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), wherein the charging energy of the LP-generators (14, 16, 18) is supplied over a transformer (T1, T2, ..Tn), with a primary winding (P1, P2, .. Pn), and a secondary winding (SW1, SW2, .. SWn) for each LP-generator (14, 16, 18)